H01J 37/073
Electron guns using field emission, photo emission, or secondary emission electron sources
H01J37/073 (Electron guns using field emission, photo emission, or secondary emission electron sources) appears on 417 US grants and 388 published applications in this corpus.
Search patents in H01J- Granted patents
- 417
- Published applications
- 388
- Assignees
- 176
- Inventors
- 805
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 8 | 0 |
| 1977 | 4 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 2 | 0 |
| 1982 | 0 | 0 |
| 1983 | 2 | 0 |
| 1984 | 3 | 0 |
| 1985 | 1 | 0 |
| 1986 | 5 | 0 |
| 1987 | 4 | 0 |
| 1988 | 4 | 0 |
| 1989 | 5 | 0 |
| 1990 | 7 | 0 |
| 1991 | 7 | 0 |
| 1992 | 5 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 0 | 0 |
| 1996 | 4 | 0 |
| 1997 | 3 | 0 |
| 1998 | 4 | 0 |
| 1999 | 4 | 0 |
| 2000 | 2 | 0 |
| 2001 | 2 | 2 |
| 2002 | 8 | 11 |
| 2003 | 5 | 9 |
| 2004 | 9 | 14 |
| 2005 | 10 | 11 |
| 2006 | 16 | 12 |
| 2007 | 11 | 14 |
| 2008 | 12 | 20 |
| 2009 | 9 | 16 |
| 2010 | 15 | 15 |
| 2011 | 14 | 8 |
| 2012 | 7 | 6 |
| 2013 | 9 | 16 |
| 2014 | 16 | 10 |
| 2015 | 7 | 12 |
| 2016 | 8 | 15 |
| 2017 | 16 | 10 |
| 2018 | 19 | 13 |
| 2019 | 12 | 26 |
| 2020 | 30 | 21 |
| 2021 | 11 | 24 |
| 2022 | 24 | 30 |
| 2023 | 23 | 28 |
| 2024 | 18 | 15 |
| 2025 | 21 | 17 |
| 2026 | 5 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Charged particle gun and charged particle beam apparatus29 Sep 2026US 12,749,643 B2Hitachi High-Tech Corporation
- Electron beam applicator and creation method of detection data in electron beam applicator15 Sep 2026US 12,738,441 B2Photo electron Soul Inc.
- Method for estimating cathode lifetime of electron gun, and electron beam writing apparatus28 Jul 2026US 12,695,046 B2NuFlare Technology, Inc.
- Electron beam application device21 Jul 2026US 12,688,992 B2Hitachi High-Tech Corporation
- Electron gun chamber for scanning electron microscope, electron gun containing same, and scanning electron microscope19 May 2026US 12,633,493 B2National Institute for Materials Science
- Applied electron beam device and electron beam generation method3 Sep 2026US 2026/0260838 A1Hitachi High-Tech Corporation
- Electron Beam Application Device20 Aug 2026US 2026/0245828 A1Hitachi High-Tech Corporation
- Silicon carbide based triode electron emitter and producing an electron beam with same23 Jul 2026US 2026/0213110 A1
- Electron emission source18 Jun 2026US 2026/0171342 A1Infovion Inc.
- Local observation method, program, storage medium, and electron beam applicator18 Jun 2026US 2026/0171351 A1Photo electron Soul Inc.
Most cited
By later US patents
- Laser stimulated high current density photoelectron generator and method of manufacture235US 4,460,831 AThermo Electron Corporation · 1984
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- Generating electrons with an activated photocathode68US 7,015,467 B2APPLIED Materials.Inc. · 2006
- Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication64US 5,126,574 AThe United States of America as represented by the Secretary of Commerce · 1992
- Maskless photon-electron spot-grid array printer64US 6,841,787 B2APPLIED Materials.Inc. · 2005