H01J 37/067
Replacing parts of guns
Official title: Replacing parts of guns; Mutual adjustment of electrodes (H01J37/073 - H01J37/077 take precedence; vacuum locks H01J37/18)
H01J37/067 (Replacing parts of guns) appears on 41 US grants and 38 published applications in this corpus.
Search patents in H01J- Granted patents
- 41
- Published applications
- 38
- Assignees
- 43
- Inventors
- 146
- Latest grant
- 23 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 1 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 1 |
| 2005 | 0 | 0 |
| 2006 | 0 | 3 |
| 2007 | 1 | 0 |
| 2008 | 2 | 2 |
| 2009 | 2 | 2 |
| 2010 | 5 | 3 |
| 2011 | 1 | 1 |
| 2012 | 0 | 3 |
| 2013 | 0 | 1 |
| 2014 | 3 | 3 |
| 2015 | 1 | 1 |
| 2016 | 2 | 0 |
| 2017 | 1 | 1 |
| 2018 | 1 | 2 |
| 2019 | 2 | 1 |
| 2020 | 1 | 3 |
| 2021 | 3 | 3 |
| 2022 | 0 | 1 |
| 2023 | 1 | 3 |
| 2024 | 1 | 0 |
| 2025 | 2 | 2 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Electron gun21 May 2024US 11,990,307 B2Thales Deutschland GmbH Electron Devices
- Charged particle source module17 Jan 2023US 11,557,455 B2ASML Netherlands B. V.
- Multi-beam particle microscope with a quickly replaceable particle source, and method for quickly replacing a particle source in the multi-beam particle microscope8 Jan 2026US 2026/0011524 A1
- Charged Particle Beam System and Replacement Method for Charged Particle Source Unit18 Sep 2025US 2025/0292992 A1JEOL Ltd.
- Electron gun and system and method using electron gun13 Feb 2025US 2025/0054720 A1
- Charged Particle Beam Source and Charged Particle Beam System5 Oct 2023US 2023/0317400 A1JEOL Ltd.
- Ion beam extraction apparatus and method for creating an ion beam20 Jul 2023US 2023/0230793 A1MAX-PLANCK-GESELLSCHAFT zur FOERDERUNG der WISSENSCHAFTEN.e.V
Most cited
By later US patents
- Electron beam generator and emission cathode14US 5,159,234 ABalzers Aktiengesellschaft · 1992
- Device for the generation of electron beams8US 5,623,148 AVon Ardenne Anlagentechnik GmbH · 1997
- Cathode mounting a high-frequency piezoelectric chip7US 4,772,817 AHitachi, Ltd. · 1988
- Method and apparatus for use an electron gun employing a thermionic source of electrons7US 6,196,889 B1United Technologies Corporation · 2001
- Electron gun having electrically isolated and adjustable cathode6US 5,686,785 AMishznarodnii Zentr Elektronno-Prome-newikh Tekhnologii IES im. E.O. Patona NAN · 1997