Charged particle source module

A charged particle source for generating and emitting a charged particle beam, comprising:

• a frame including a first frame part, a second frame part, and one or more support members which are arranged between said first frame part and said second frame part;
• a charged particle source arrangement for generating a charged particle beam;
• and
• a power connecting assembly arranged at said first frame part,
• wherein said charged particle source arrangement is electrically connected to said power connecting assembly via electrical wiring,
• wherein said electrical wiring comprises a bend along a portion of the electrical wiring, the bend extending in a direction that is not parallel to the direction of the electrical wiring;
• and
• wherein said frame comprises mounting members that are connected to said second frame part by flexure connections.