Cathode mounting a high-frequency piezoelectric chip
AssigneeHitachi, Ltd.
InventorsToshiyuki Aida, Hiroshi Takeuchi, Sumio Hosaka, Shigeyuki Hosoki, Tadashi Ikeda
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Abstract
A piezoelectric crystal without spontaneous polarization such as Li.sub.2 B.sub.4 O.sub.7 or quartz crystal is jointed to a cathode on the side opposite to the tip thereof to finely drive the cathode. The surface observation apparatus mounting the cathode makes it possible to observe the surface of a sample at high speeds.
Claims4
A cathode mounting a high-frequency piezoelectric chip, which comprises a cathode tip arranged maintaining a gap with respect to a sample to be measured that serves as an anode, and at least one piezoelectric crystal chip without spontaneous polarization that is joined to said cathode tip, said cathode tip being mounted on said piezoelectric crystal chip to be displaced by the strain of said piezoelectric crystal chip, and said piezoelectric crystal chip without spontaneous polarization being composed of an Li.sub.2 B.sub.4 O.sub.7 or a quartz crystal.
Dependencies are inferred from the claim text.