Electron beam irradiation device
AssigneeNhv Corporation
InventorsTomonori Shirahashi, Takashi Baba, Hirotaka Hayashi, Hideyuki Asano
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Abstract
An electron beam irradiation device (1) irradiates an electron beam from an electrode (12) that is connected to a tip of a conductive part (21) which projects inside a vacuum container (11), to the exterior of the vacuum container (11) via a metal foil (111) that constitutes a portion of a peripheral wall of the vacuum container (11). The electron beam irradiation device (1) includes a tubular insulator (22) that surrounds the periphery of the conductive part (21) in the vacuum container (11), and an amorphous carbon film (23) that covers the outer peripheral surface of the insulator (22).
Claims5
An electron beam irradiation device, adapted for irradiating an electron beam from an electrode connected to a tip of a conductive part projecting inside a vacuum container to exterior of the vacuum container via a metal foil that constitutes a portion of a peripheral wall of the vacuum container, wherein
- the electron beam irradiation device comprises an insulator of a tubular shape surrounding a periphery of the conductive part in the vacuum container;
- the insulator has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the insulator;
- a cover of a cylindrical shape, surrounding a periphery of a portion between a tip of the insulator and a base end of the electrode;
- and
- the cover has an amorphous carbon film covering one or both of an inner peripheral surface and an outer peripheral surface of the cover.
Dependencies are inferred from the claim text.