H01J 2237/28
Scanning microscopes
H01J2237/28 (Scanning microscopes) appears on 2,853 US grants and 3,065 published applications in this corpus.
Search patents in H01J- Granted patents
- 2,853
- Published applications
- 3,065
- Assignees
- 462
- Inventors
- 4,087
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 1 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 3 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 4 | 0 |
| 1994 | 3 | 0 |
| 1995 | 12 | 0 |
| 1996 | 13 | 0 |
| 1997 | 9 | 0 |
| 1998 | 20 | 0 |
| 1999 | 14 | 0 |
| 2000 | 18 | 0 |
| 2001 | 22 | 18 |
| 2002 | 44 | 50 |
| 2003 | 74 | 64 |
| 2004 | 57 | 86 |
| 2005 | 83 | 87 |
| 2006 | 84 | 115 |
| 2007 | 78 | 124 |
| 2008 | 103 | 122 |
| 2009 | 87 | 107 |
| 2010 | 100 | 87 |
| 2011 | 86 | 97 |
| 2012 | 110 | 109 |
| 2013 | 95 | 102 |
| 2014 | 124 | 105 |
| 2015 | 123 | 168 |
| 2016 | 135 | 139 |
| 2017 | 142 | 142 |
| 2018 | 126 | 120 |
| 2019 | 148 | 181 |
| 2020 | 186 | 182 |
| 2021 | 168 | 147 |
| 2022 | 127 | 190 |
| 2023 | 118 | 162 |
| 2024 | 109 | 135 |
| 2025 | 131 | 133 |
| 2026 | 86 | 93 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 2237/2813Characterised by the applicationIndexing code1,551
- H01J 2237/2803Characterised by the imaging methodIndexing code509
- H01J 2237/2802Transmission microscopesIndexing code473
- H01J 2237/2809Characterised by the imaging problems involvedIndexing code338
- H01J 2237/2801DetailsIndexing code100
- H01J 2237/2812Emission microscopesIndexing code34
- H01J 2237/2818Scanning tunnelling microscopesIndexing code33
Recent patents
- Assessment system, method of assessing6 Oct 2026US 12,755,929 B2ASML Netherlands B. V.
- Charged particle gun and charged particle beam apparatus29 Sep 2026US 12,749,643 B2Hitachi High-Tech Corporation
- Discharging a region of a sample29 Sep 2026US 12,749,648 B2Applied Materials Israel Ltd.
- Inspection system15 Sep 2026US 12,736,487 B2Hitachi High-Tech Corporation
- Laser thermal epitaxy in a charged particle microscope15 Sep 2026US 12,738,446 B2FEI Company
- Compensating for collection variation of scanning charged particle-optical apparatus8 Oct 2026US 2026/0311961 A1ASML Netherlands B. V.
- Scanning electron microscopy-based sample analysis1 Oct 2026US 2026/0302129 A1Infineon Technologies AG
- System and method for detecting defects on a wafer and related non-transitory computer-readable medium1 Oct 2026US 2026/0305262 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Multi-beam charged particle microscope for inspection with reduced charging effects17 Sep 2026US 2026/0279715 A1
- Charged particle beam device17 Sep 2026US 2026/0279717 A1Samsung Electronics Co., Ltd.
Most cited
By later US patents
- Electron beam inspection system and method266US 5,578,821 AKLA Instruments Corporation · 1996
- Feature-based defect detection256US 6,539,106 B1APPLIED Materials.Inc. · 2003
- Method of detecting defects in patterned substrates227US 6,252,412 B1Schlumberger Technologies, Inc. · 2001
- Stepper type test structures and methods for inspection of semiconductor integrated circuits184US 6,633,174 B1KLA-Tencor Corporation · 2003
- Microstructure defect detection182US 6,232,787 B1Schlumberger Technologies, Inc. · 2001