US 12,755,929 B2 · Assessment system, method of assessing

Abstract

Assessment systems and methods are disclosed. In one arrangement, charged particles are directed in sub-beams arranged in a multi-beam towards a sample. A plurality of control electrodes define a control lens array. Each control lens in the control lens array is aligned with a sub-beam path of a respective sub-beam of the multi-beam and configured to operate on the respective sub-beam. A plurality of objective electrodes define an objective lens array that directs the sub-beams onto a sample. Objective lenses are aligned with a sub-beam path aligned with a respective control lens. Selectable landing energies are implemented for a sub-beam of the multi-beam by applying corresponding potentials to the control electrodes and the objective electrodes. A controller is configured to select corresponding potentials so a spatial relationship between an image plane of the system and all control electrodes and objective electrodes is the same for each selectable landing energy.

Claims20

Dependent claims

An assessment system configured to direct charged particles in sub-beams arranged in a multi-beam towards a sample, the system comprising:

a plurality of control electrodes defining a control lens array, each control lens in the control lens array being aligned with a sub-beam path of a respective sub-beam of the multi-beam and configured to operate on the respective sub-beam;
a plurality of objective electrodes defining an objective lens array configured to direct the sub-beams onto a sample, each objective lens in the objective lens array being aligned with a sub-beam path aligned with a respective control lens;
and
a controller configured to implement a plurality of selectable landing energies for a sub-beam of the multi-beam by applying corresponding potentials to the control electrodes and the objective electrodes, wherein:
the controller is configured to select the corresponding potentials such that a spatial relationship between an image plane of the system and all of the control electrodes and objective electrodes is the same for each of the selectable landing energies.

2 more elements

An assessment system configured to direct charged particles in a multi-beam towards a sample, the system comprising:

a plurality of control electrodes defining a control lens array, each control lens in the control lens array being aligned with a sub-beam path of a respective sub-beam of the multi-beam and configured to operate on the respective sub-beam;
a plurality of objective electrodes defining an objective lens array configured to direct the sub-beams onto a sample, each objective lens in the objective lens array being aligned with a sub-beam path aligned with a respective control lens;
and
a controller, wherein
the controller is configured to provide a plurality of selectable beam currents of a sub-beam, and to implement each selectable beam current by selecting a corresponding demagnification of the control lens array;
and
the controller is configured to:
implement a plurality of selectable landing energies for a sub-beam of the multi-beam by applying corresponding potentials to the control electrodes and the objective electrodes;
and
on implementation of the selected landing energies, apply potentials to the control electrodes to select corresponding minimized resolutions of the sub-beam on the sample.

7 more elements

Dependencies are inferred from the claim text.

Assessment system, method of assessing

Life of this patent

Assessment system, method of assessing

Life of this patent

Abstract

Claims20