H01J 2237/26
Electron or ion microscopes
H01J2237/26 (Electron or ion microscopes) appears on 3,559 US grants and 3,778 published applications in this corpus.
Search patents in H01J- Granted patents
- 3,559
- Published applications
- 3,778
- Assignees
- 619
- Inventors
- 4,996
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 2 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 0 | 0 |
| 1985 | 3 | 0 |
| 1986 | 2 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 5 | 0 |
| 1991 | 2 | 0 |
| 1992 | 6 | 0 |
| 1993 | 6 | 0 |
| 1994 | 4 | 0 |
| 1995 | 23 | 0 |
| 1996 | 22 | 0 |
| 1997 | 11 | 0 |
| 1998 | 29 | 0 |
| 1999 | 18 | 0 |
| 2000 | 26 | 0 |
| 2001 | 26 | 19 |
| 2002 | 53 | 57 |
| 2003 | 95 | 84 |
| 2004 | 75 | 105 |
| 2005 | 95 | 101 |
| 2006 | 101 | 148 |
| 2007 | 87 | 151 |
| 2008 | 140 | 153 |
| 2009 | 111 | 138 |
| 2010 | 127 | 120 |
| 2011 | 112 | 127 |
| 2012 | 139 | 133 |
| 2013 | 113 | 134 |
| 2014 | 165 | 140 |
| 2015 | 153 | 219 |
| 2016 | 176 | 181 |
| 2017 | 175 | 175 |
| 2018 | 159 | 148 |
| 2019 | 181 | 211 |
| 2020 | 227 | 224 |
| 2021 | 195 | 176 |
| 2022 | 158 | 220 |
| 2023 | 140 | 188 |
| 2024 | 131 | 158 |
| 2025 | 151 | 162 |
| 2026 | 105 | 106 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01J 2237/28Scanning microscopesIndexing code2,853
- H01J 2237/282Determination of microscope propertiesIndexing code329
- H01J 2237/2602DetailsIndexing code240
- H01J 2237/2614Holography or phase contrast, phase related imaging in generalIndexing code156
- H01J 2237/2611Stereoscopic measurements and/or imagingIndexing code104
- H01J 2237/262Non-scanning techniquesIndexing code97
- H01J 2237/285Emission microscopesIndexing code59
- H01J 2237/2617Comparison or superposition of transmission imagesIndexing code25
Recent patents
- Assessment system, method of assessing6 Oct 2026US 12,755,929 B2ASML Netherlands B. V.
- Charged particle gun and charged particle beam apparatus29 Sep 2026US 12,749,643 B2Hitachi High-Tech Corporation
- Method of characterizing a detection path of a charged particle beam and a charged particle mirror29 Sep 2026US 12,749,645 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Discharging a region of a sample29 Sep 2026US 12,749,648 B2Applied Materials Israel Ltd.
- Inspection system15 Sep 2026US 12,736,487 B2Hitachi High-Tech Corporation
- Compensating for collection variation of scanning charged particle-optical apparatus8 Oct 2026US 2026/0311961 A1ASML Netherlands B. V.
- Scanning electron microscopy-based sample analysis1 Oct 2026US 2026/0302129 A1Infineon Technologies AG
- System and method for detecting defects on a wafer and related non-transitory computer-readable medium1 Oct 2026US 2026/0305262 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Multi-beam charged particle microscope for inspection with reduced charging effects17 Sep 2026US 2026/0279715 A1
- Charged particle beam device17 Sep 2026US 2026/0279717 A1Samsung Electronics Co., Ltd.
Most cited
By later US patents
- Electron beam inspection system and method266US 5,578,821 AKLA Instruments Corporation · 1996
- Feature-based defect detection256US 6,539,106 B1APPLIED Materials.Inc. · 2003
- Method of detecting defects in patterned substrates227US 6,252,412 B1Schlumberger Technologies, Inc. · 2001
- Stepper type test structures and methods for inspection of semiconductor integrated circuits184US 6,633,174 B1KLA-Tencor Corporation · 2003
- Microstructure defect detection182US 6,232,787 B1Schlumberger Technologies, Inc. · 2001