Scanning electron microscopy-based sample analysis

A method comprising:

• performing a scanning electron microscopy (SEM) process on a sample to generate a SEM map indicative of a first measure of electrons relative to a first region of the sample and a second measure of electrons relative to a second region of the sample, wherein the first region is associated with a reference dopant concentration;
• determining, based upon the reference dopant concentration and the first measure of electrons associated with the first region, a conversion function;
• and
• converting, using the conversion function, the second measure of electrons to a second dopant concentration in the second region of the sample.

A method comprising:

• generate a map indicative of a first measure of electrons relative to a first region of the sample and a second measure of electrons relative to a second region of the sample, wherein the first region is associated with a reference dopant concentration;
• determining, based upon the reference dopant concentration and the first measure of electrons associated with the first region, a conversion function;
• and
• converting, using the conversion function, the second measure of electrons to a second dopant concentration in the second region of the sample.