H01J 2237/2801
Details
H01J2237/2801 (Details) appears on 100 US grants and 111 published applications in this corpus.
Search patents in H01J- Granted patents
- 100
- Published applications
- 111
- Assignees
- 37
- Inventors
- 249
- Latest grant
- 14 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2005 | 0 | 1 |
| 2006 | 1 | 1 |
| 2007 | 0 | 1 |
| 2008 | 2 | 2 |
| 2009 | 1 | 1 |
| 2010 | 3 | 3 |
| 2011 | 1 | 0 |
| 2012 | 1 | 1 |
| 2013 | 0 | 2 |
| 2014 | 4 | 5 |
| 2015 | 11 | 28 |
| 2016 | 17 | 15 |
| 2017 | 11 | 8 |
| 2018 | 8 | 6 |
| 2019 | 6 | 4 |
| 2020 | 4 | 6 |
| 2021 | 6 | 7 |
| 2022 | 6 | 7 |
| 2023 | 6 | 3 |
| 2024 | 2 | 4 |
| 2025 | 7 | 3 |
| 2026 | 3 | 3 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Scanning electron microscopy-based sample analysis14 Jul 2026US 12,683,118 B2Infineon Technologies AG
- Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatus19 May 2026US 12,633,489 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Gas supply device, particle beam apparatus having a gas supply device, and method of operating the gas supply device and the particle beam apparatus24 Feb 2026US 12,562,337 B2Carl Zeiss Microscopy GmbH
- Energy filter, and energy analyzer and charged particle beam device provided with same28 Oct 2025US 12,456,597 B2Hitachi High-Tech Corporation
- Scanning electron microscopy-based tomography of specimens28 Oct 2025US 12,456,600 B2Applied Materials Israel Ltd.
- Scanning electron microscopy-based sample analysis1 Oct 2026US 2026/0302129 A1Infineon Technologies AG
- Modular metrology apparatus for interchangeable process modules10 Sep 2026US 2026/0269171 A1
- Method for operating a multiple particle beam system, calibration method for a multiple particle beam system, computer program product and multiple particle beam system with increased performance6 Aug 2026US 2026/0229444 A1
- Improved scanning electron microscope and method of using the same17 Jul 2025US 2025/0231130 A1FEI Company
- Electron beam apparatus, foil or grid lens, and method of operating an electron beam apparatus13 Mar 2025US 2025/0087442 A1ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Most cited
By later US patents
- Testing apparatus using charged particles and device manufacturing method using the testing apparatus76US 7,138,629 B2Ebara Corporation · 2006
- Charged particle beam system33US 10,811,215 B2Carl Zeiss MultiSEM GmbH · 2020
- Method for operating a multi-beam particle microscope32US 10,388,487 B2Carl Zeiss Microscopy GmbH · 2019
- Testing apparatus using charged particles and device manufacturing method using the testing apparatus26US 7,365,324 B2Ebara Corporation · 2008
- Testing apparatus using charged particles and device manufacturing method using the testing apparatus23US 7,741,601 B2Ebara Corporation · 2010