H01J 2237/0815
Methods of ionisation
H01J2237/0815 (Methods of ionisation) appears on 374 US grants and 389 published applications in this corpus.
Search patents in H01J- Granted patents
- 374
- Published applications
- 389
- Assignees
- 130
- Inventors
- 663
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 4 | 0 |
| 1997 | 0 | 0 |
| 1998 | 3 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 2 | 6 |
| 2002 | 6 | 12 |
| 2003 | 8 | 14 |
| 2004 | 8 | 15 |
| 2005 | 8 | 12 |
| 2006 | 18 | 11 |
| 2007 | 12 | 22 |
| 2008 | 15 | 24 |
| 2009 | 12 | 31 |
| 2010 | 24 | 15 |
| 2011 | 21 | 18 |
| 2012 | 16 | 17 |
| 2013 | 18 | 13 |
| 2014 | 20 | 16 |
| 2015 | 18 | 20 |
| 2016 | 13 | 13 |
| 2017 | 21 | 10 |
| 2018 | 9 | 15 |
| 2019 | 21 | 14 |
| 2020 | 17 | 18 |
| 2021 | 18 | 18 |
| 2022 | 13 | 13 |
| 2023 | 12 | 12 |
| 2024 | 12 | 14 |
| 2025 | 9 | 9 |
| 2026 | 4 | 7 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Ion generation device and ion implanter18 Aug 2026US 12,712,144 B2Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Ion microscope14 Jul 2026US 12,683,113 B2National University of Singapore
- Mixed-gas species plasma source system21 Apr 2026US 12,609,276 B2FEI Company
- Ion source head and ion source head curved liner, deflector, or repeller13 Jan 2026US 12,525,421 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly23 Dec 2025US 12,505,979 B2Canon Anelva Corporation
- Ion generation apparatus9 Jul 2026US 2026/0196437 A1Fidelity semiconductor CORPORATION
- Ion source head and ion source head curved liner, deflector, or repeller23 Apr 2026US 2026/0112567 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Ion source and operating method thereof12 Mar 2026US 2026/0074138 A1Nissin Ion Equipment Co., Ltd.
- Ion source with coaxial gas conduit5 Mar 2026US 2026/0066211 A1
- Split ring resonator ion beam source19 Feb 2026US 2026/0051453 A1FEI Company
Most cited
By later US patents
- Plasma generating apparatus for large area plasma processing135US 5,032,202 AMartin Marietta Energy Systems, Inc. · 1991
- Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon122US 5,858,477 AAkashic Memories Corporation · 1999
- Method for inspecting substrate, substrate inspecting system and electron beam apparatus113US 7,109,483 B2Ebara Corporation · 2006
- Processing method and apparatus using focused ion beam generating means79US 5,825,035 AHitachi, Ltd. · 1998
- Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former61US 6,855,929 B2Ebara Corporation · 2005