Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon
AssigneeAkashic Memories Corporation
InventorsVijayen Veerasamy, Manfred Weiler, Eric Li
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AssigneeAkashic Memories Corporation
InventorsVijayen Veerasamy, Manfred Weiler, Eric Li
Estimating the term…
The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp.sup.3 carbon--carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or "quasi-static") magnetic field, which promotes resonant ionization and ion beam homogenization.
A method for producing magnetic recording media, the method comprising:
A method as claimed in claim 15, wherein the impact energy is between about 100 and 120 eV for each carbon atom.
A method for producing magnetic recording media, the method comprising:
A method for producing magnetic recording media, the method comprising:
A method for producing magnetic recording media, the method comprising:
A method for producing magnetic recording media, the method comprising:
Dependencies are inferred from the claim text.