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US 12,683,113 B2Granted
Ion microscope
AssigneeNational University of Singapore
InventorJeroen Anton Van Kan
Life of this patent
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Abstract
An ion microscope, a method of constructing an ion microscope, and a method of aligning an ion beam in an ion microscope. The microscope comprises a nano-aperture ion source; and a focusing system; wherein the focusing system is configured for selectively coaxially focusing an ion beam generated from an electron beam ionizing an ionizing gas in the nano-aperture ion source and the electron beam.
Claims20
An ion microscope comprising:
- a nano-aperture ion source;
- and
- a focusing system;
- wherein the focusing system is configured for selectively coaxially focusing an ion beam generated from an electron beam ionizing an ionizing gas in the nano-aperture ion source and the electron beam such that the electron beam and the ion beam follow the same path through the ion microscope.
1 more element
A method of constructing an ion microscope comprising the steps of:
- providing a nano-aperture ion source;
- and
- providing a focusing system;
- wherein the focusing system is configured for selectively coaxially focusing an ion beam generated from an electron beam ionizing an ionizing gas in the nano-aperture ion source and the electron beam such that the electron beam and the ion beam follow the same path through the ion microscope.
1 more element
A method of aligning an ion beam in an ion microscope comprising the steps of:
- providing a nano-aperture ion source;
- and
- providing a focusing system;
- and
- selectively coaxially focusing the ion beam generated from an electron beam ionizing an ionizing gas in the nano-aperture ion source and the electron beam such that the electron beam and the ion beam follow the same path through the ion microscope.
2 more elements
Dependencies are inferred from the claim text.