H01J 2237/0817
Microwaves
H01J2237/0817 (Microwaves) appears on 85 US grants and 74 published applications in this corpus.
Search patents in H01J- Granted patents
- 85
- Published applications
- 74
- Assignees
- 41
- Inventors
- 179
- Latest grant
- 2 Sep 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1991 | 1 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 3 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 1 | 0 |
| 2001 | 2 | 1 |
| 2002 | 1 | 0 |
| 2003 | 0 | 1 |
| 2004 | 2 | 2 |
| 2005 | 0 | 0 |
| 2006 | 2 | 1 |
| 2007 | 1 | 0 |
| 2008 | 1 | 4 |
| 2009 | 1 | 7 |
| 2010 | 3 | 3 |
| 2011 | 4 | 6 |
| 2012 | 3 | 3 |
| 2013 | 6 | 7 |
| 2014 | 10 | 3 |
| 2015 | 6 | 9 |
| 2016 | 4 | 4 |
| 2017 | 8 | 0 |
| 2018 | 1 | 4 |
| 2019 | 5 | 5 |
| 2020 | 8 | 3 |
| 2021 | 2 | 3 |
| 2022 | 1 | 4 |
| 2023 | 3 | 2 |
| 2024 | 2 | 1 |
| 2025 | 1 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Methods and systems for reclamation of Li-ion cathode materials using microwave plasma processing2 Sep 2025US 12,406,829 B26K Inc.
- Single beam plasma source10 Dec 2024US 12,165,829 B2Board of Trustees of Michigan State University
- Active temperature control for RF window in immersed antenna source18 Jun 2024US 12,014,898 B2APPLIED Materials.Inc.
- Modular microwave source with embedded ground surface6 Jun 2023US 11,670,489 B2APPLIED Materials.Inc.
- Electrodynamic mass analysis with RF biased ion source21 Feb 2023US 11,587,778 B2APPLIED Materials.Inc.
- High temperature nv center sensing up to 1400k22 Jan 2026US 2026/0024718 A1The Chinese University of Hong Kong
- Vaporizer, ion source, ion beam irradiation apparatus, and an operating method for a vaporizer6 Jun 2024US 2024/0186101 A1Nissin Ion Equipment Co., Ltd.
- Dual-wall multi-structure quartz cylinder device2 Nov 2023US 2023/0352267 A1Jiangsu Leuven Instruments Co. Ltd
- Active temperature control for rf window in immersed antenna source30 Mar 2023US 2023/0102972 A1APPLIED Materials.Inc.
- Methods and systems for reclamation of li-ion cathode materials using microwave plasma processing14 Jul 2022US 2022/0223379 A16K Inc.
Most cited
By later US patents
- Plasma generating apparatus for large area plasma processing135US 5,032,202 AMartin Marietta Energy Systems, Inc. · 1991
- Processing method and apparatus using focused ion beam generating means79US 5,825,035 AHitachi, Ltd. · 1998
- Process method and apparatus using focused ion beam generating means52US 5,504,340 AHitachi, Ltd. · 1996
- Process method and apparatus using focused ion beam generating means43US 5,583,344 AHitachi, Ltd. · 1996
- Electron-cyclotron resonance type ion beam source for ion implanter34US 6,803,585 B22004