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US 11,670,489 B2Granted
Modular microwave source with embedded ground surface
AssigneeApplied Materials, Inc.
InventorsJoseph F. AuBuchon, James Carducci, Larry D. Elizaga, Richard C. Fovell, Philip Allan Kraus, Thai Cheng Chua
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Abstract
Embodiments disclosed herein include a source for a processing tool. In an embodiment, the source comprises a dielectric plate having a first surface and a second surface opposite from the first surface, and a cavity into the first surface of the dielectric plate. In an embodiment, the cavity comprises a third surface that is between the first surface and the second surface. In an embodiment, the source further comprises a dielectric resonator extending away from the third surface.
Claims10
A source, comprising:
- a dielectric plate having a first surface and a second surface opposite from the first surface;
- a cavity into the first surface of the dielectric plate, wherein the cavity comprises a third surface that is between the first surface and the second surface;
- and
- a dielectric resonator extending away from the third surface.
1 more element
Dependencies are inferred from the claim text.