Plasma generating apparatus for large area plasma processing

A plasma etch apparatus for large area plasma etching of a sample comprising:

• a vacuum vessel comprising a bottom plate, cylindrical wall, and top plate:
• a sample holder disposed in said vacuum vessel;
• a processing gas introduced into said vacuum vessel;
• a microwave waveguide launcher attached to said top plate and coaxial with said cylindrical wall;
• a microwave generator;
• a waveguide disposed in said microwave waveguide launcher for receiving microwaves from said microwave generator;
• a launcher waveguide disposed in the vacuum vessel end of said microwave waveguide launcher;
• a microwave window disposed in said microwave waveguide launcher between said waveguide and said launcher waveguide;
• a solenoid coil disposed around said microwave waveguide launcher, said solenoid coil providing a coaxial induced high flux magnetic field within said microwave waveguide launcher, and said processing gas, microwaves, and magnetic field producing a dense ECR plasma in the vacuum vessel end of said launcher waveguide in said microwave waveguide launcher, and said dense ECR plasma diffusing into said vacuum vessel to produce a main plasma therein;
• a plurality of line cusp permanent magnet columns equally spaced about said cylindrical wall, said line cusp permanent magnets producing a line cusp magnetic field at said cylindrical wall, and said processing gas, microwaves and line cusp magnetic field producing a line cusp ECR plasma at said permanent magnet columns, and said line cusp ECR plasma diffusing into said vacuum vessel and contributing to the formation of said main plasma;
• and
• a cylindrically-shaped soft iron magnetic flux return disposed around said solenoid coil, said flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel.

A plasma generating apparatus comprising:

• a vacuum vessel;
• a processing gas introduced into said vacuum vessel;
• a microwave generator;
• a launcher waveguide connected for receiving microwaves from said microwave generator and conveying said microwaves into said vacuum vessel;
• a solenoid coil disposed around said launcher waveguide and producing a high flux magnetic field, said high flux magnetic field interacting with said microwaves and said processing gas to produce a dense ECR plasma, said dense ECR plasma diffusing into said vacuum vessel to produce a uniform and dense main plasma therein;
• a soft iron magnetic flux return positioned around said solenoid coil, said magnetic flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel;
• and
• a plurality of line cusp permanent magnet columns equally spaced about said vacuum vessel, said magnet columns producing a line cusp magnetic field for confining said main plasma.

A plasma generating apparatus comprising:

• a vacuum vessel;
• a processing gas introduced into said vacuum vessel;
• a microwave generator;
• a launcher waveguide connected for receiving microwaves from said microwave generator and conveying said microwaves into said vacuum vessel;
• a solenoid coil disposed around said launcher waveguide and producing a high flux magnetic field, said high flux magnetic field interacting with said microwaves and said processing gas to produce a dense ECR plasma, said dense ECR plasma diffusing into said vacuum vessel to produce a uniform and dense main plasma therein;
• a soft iron magnetic flux return positioned around said solenoid coil, said magnetic flux return interacting with said high flux magnetic field to reduce the exciting current in said solenoid coil required for said dense ECR plasma condition and minimize stray magnetic field in said vacuum vessel;
• and
• a plurality of line cusp permanent magnet columns equally spaced about said vacuum vessel, said permanent magnets being of strong magnetic field to produce the ECR plasma formation condition at said line cusp columns, said processing gas, microwaves and line cusp magnetic field interacting to produce a line cusp ECR plasma at said permanent magnet columns, and said line cusp ECR plasma diffusing into said vacuum vessel and contributing to the formation of said main plasma.