Back to results
US 2026/0074138 A1Published application
Ion source and operating method thereof
AssigneeNissin Ion Equipment Co., Ltd.
InventorHiroaki KAI
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeNissin Ion Equipment Co., Ltd.
InventorHiroaki KAI
Estimating the term…
An ion source is provided which can operate in a monomer mode or a cluster mode without experiencing losses. According to embodiments, an ion source can include a cathode that emits electrons. A plasma generation chamber can have an opening region through which the electrons pass. An electrode can be disposed between the cathode and the opening region, the electrode including a cylindrical portion through which the electrons pass. The electrode can be set to a negative potential with respect to the plasma generation chamber or a positive potential with respect to the plasma generation chamber. An exemplary method can include setting the electrode to a negative potential with respect to the plasma generation chamber if the ion species is a monoatomic ion, or setting the electrode to a positive potential with respect to the plasma generation chamber if the ion species is a molecular ion.
An ion source for generating an ion beam containing a predetermined ion species, comprising:
A method for operating an ion source that generates an ion beam containing a predetermined ion species, the ion source including a cathode that emits electrons, a plasma generation chamber having an opening region and an electrode disposed between the cathode and the opening region, the electrode including a tubular portion, the method comprising:
A method for operating an ion source that generates an ion beam containing a predetermined ion species, the method comprising:
Dependencies are inferred from the claim text.