Ion source head and ion source head curved liner, deflector, or repeller

A system, comprising:

• an implanter tool including:
• an extraction module;
• and
• an ion source head including:
• an ion source container including:
• an ion source cavity;
• a first end that delimits the ion source cavity;
• a second end opposite to the first end that delimits the ion source cavity;
• and
• a first side transverse to the first end and the second end, the first side extends from the first end to the second end;
• a cathode at the second end of the ion source container;
• an anti-cathode at the first end of the ion source container;
• and
• a curved liner within the ion source cavity and between the first end and the second end of the ion source container, the curved liner is at the first side of the ion source container and delimits the ion source cavity;
• an analyzer magnet unit (AMU) downstream from the ion source head, and the analyzer magnet unit (AMU) includes an ion inlet end and an ion outlet end opposite to the ion inlet end, and
• wherein the extraction module is downstream of the ion source head and the extraction module is configured to extract ions species generated in the ion source cavity.

A method, comprising:

• activating a cathode and an anti-cathode to generate an ion species within an ion source cavity of an ion source head of an implanter tool, the ion source cavity is delimited by a curved liner within the ion source cavity of the ion source head of the implanter tool;
• forming an ion beam by extracting the ion species generated within the ion source cavity by activating an extraction module downstream from the ion source head of the implanter tool;
• and
• directing the ion beam of the ions species extracted from the ion source cavity by the extraction module at a solid target within a target chamber downstream from the implanter tool.