Ion source with coaxial gas conduit
OwnerKlaus Becker, Adam M. McLaughlin +1inventors
InventorsKlaus Becker, Adam M. McLaughlin, Graham Wright
Life of this patent
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Abstract
An ion source includes a coaxial gas conduit is disclosed. The coaxial gas conduit includes two conduits, where the inner conduit defines an inner channel that delivers the gas that is subject to decomposition. The outer conduit and the inner conduit define an outer annular channel that delivers a gas that is less susceptible to decomposition, such as an inert or diluent gas. This coaxial gas conduit is configured such that only the outer conduit physically contacts the walls of the ion source. This serves to lower the temperature of the inner conduit and the gas flowing therethrough. Further, in some embodiments, the inner conduit may be in thermal contact with a heat sink to further lower its temperature.
Claims20
An indirectly heated cathode ion source, comprising:
- an arc chamber, comprising a plurality of walls;
- an indirectly heated cathode disposed in the arc chamber;
- a coaxial gas conduit to introduce one or more feed gasses to the arc chamber, wherein the coaxial gas conduit comprises:
- an inner conduit defining an inner channel to introduce a first feed gas into the arc chamber;
- and
- an outer conduit.
An ion implanter, comprising:
- an ion source;
- a workpiece holder;
- and
- one or more beamline components disposed between the ion source and the workpiece holder;
- wherein a coaxial gas conduit is used to introduce one or more feed gasses to the ion source.
Dependencies are inferred from the claim text.