G03F 7/2065
Using corpuscular radiation other than electron beams
Official title: {using corpuscular radiation other than electron beams}
G03F7/2065 (Using corpuscular radiation other than electron beams) appears on 36 US grants and 26 published applications in this corpus.
Search patents in G03F- Granted patents
- 36
- Published applications
- 26
- Assignees
- 29
- Inventors
- 92
- Latest grant
- 29 Nov 2022
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1983 | 2 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 1 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 4 | 0 |
| 2000 | 3 | 0 |
| 2001 | 0 | 1 |
| 2002 | 1 | 1 |
| 2003 | 0 | 1 |
| 2004 | 1 | 0 |
| 2005 | 1 | 1 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 1 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 1 |
| 2012 | 1 | 0 |
| 2013 | 0 | 1 |
| 2014 | 3 | 6 |
| 2015 | 4 | 2 |
| 2016 | 0 | 3 |
| 2017 | 2 | 1 |
| 2018 | 1 | 0 |
| 2019 | 1 | 3 |
| 2020 | 0 | 2 |
| 2021 | 3 | 0 |
| 2022 | 1 | 0 |
| 2023 | 0 | 1 |
| 2024 | 0 | 0 |
| 2025 | 0 | 0 |
| 2026 | 0 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method of forming gratings29 Nov 2022US 11,512,385 B2APPLIED Materials.Inc.
- Methods of forming devices on a substrate7 Dec 2021US 11,193,198 B2APPLIED Materials.Inc.
- Fabrication methods for nanodelivery systems for long term controlled delivery of active pharmaceutical ingredients31 Aug 2021US 11,103,460 B2Board of Regents, The University of Texas System
- Device and method of manufacturing a structure made of a curable material by means of molding25 May 2021US 11,014,269 B2Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e. V.
- Pattern formation method, active light-sensitive or radiation-sensitive resin composition, resist film, production method for electronic device using same, and electronic device15 Oct 2019US 10,444,627 B2FUJIFILM Corporation
- Substrate processing method and substrate processing apparatus19 Mar 2026US 2026/0079393 A1Tokyo Electron Limited
- Conductive composition, method for producing conductive composition, and method for producing conductor6 Apr 2023US 2023/0107107 A1Mitsubishi Chemical Corporation
- Methods of forming devices on a substrate18 Jun 2020US 2020/0190658 A1APPLIED Materials.Inc.
- Method of forming gratings18 Jun 2020US 2020/0192010 A1APPLIED Materials.Inc.
- Conductive composition, method for producing conductive composition, and method for producing conductor28 Nov 2019US 2019/0359833 A1Mitsubishi Chemical Corporation
Most cited
By later US patents
- Pattern forming method by imparting hydrogen atoms and selectively depositing metal film373US 5,861,233 ACanon Kabushiki Kaisha · 1999
- Method and apparatus for plasma pyrolysis of liquid waste45US 4,886,001 AWestinghouse Electric Corp. · 1989
- Charged-particle-beam exposure apparatus and methods with substrate-temperature control40US 5,914,493 ANikon Corporation · 1999
- Method for manufacturing low work function surfaces39US 6,117,344 ABorealis Technical Limited · 2000
- Device lithography by selective ion implantation35US 4,377,437 ABell Telephone Laboratories, Incorporated · 1983