Pattern formation method, active light-sensitive or radiation-sensitive resin composition, resist film, production method for electronic device using same, and electronic device

A pattern formation method, comprising:

• (1) forming a film using an active light-sensitive or radiation-sensitive resin composition;
• (2) exposing the film to active light or radiation;
• and
• (3) developing the exposed film using a developer including an organic solvent,
• wherein the active light-sensitive or radiation-sensitive resin composition contains a resin (A) having a repeating unit represented by General Formula (I) and a repeating unit represented by General Formula (III-1), and a crosslinking agent (C),
• wherein, in General Formula (I), each of R41, R42, and R43 independently represents a hydrogen atom, an alkyl group, a halogen atom, a cyano group, or an alkoxycarbonyl group;
• here, R42 may be bonded to Ar4 to form a ring, and R42 in this case represents a single bond or an alkylene group;
• X4 represents a single bond, —COO—, or —CONR44—, and, in the case of forming a ring with R42, represents a trivalent connecting group;
• R44 represents a hydrogen atom or an alkyl group;
• L4 represents a single bond or an alkylene group;
• Ar4 represents an (n+1) valent aromatic ring group, and, in the case of being bonded to R42 to form a ring, represents an (n+2) valent aromatic ring group;
• and n represents an integer of 1 to 4,
• wherein, in General Formula (III-1), each of R1 and R2 independently represents an alkyl group having 2 to 10 carbon atoms, each of R11 and R12 independently represents an alkyl group, and R13 represents a hydrogen atom or an alkyl group;
• R11 and R12 may be connected to each other to form a ring, and R11 and R13 may be connected to each other to form a ring;
• Ra represents a methyl group, a hydroxymethyl group, or a perfluoroalkyl group having 1 to 4 carbon atoms, L5 represents a single bond, or an alkylene group, —COO-L1-, —O-L1-, or a divalent connecting group selected from the groups formed by combining two or more thereof, and L1 represents an alkylene group or a cycloalkylene group.