C23C 16/4554
Plasma being used non-continuously in between ald reactions
Official title: {Plasma being used non-continuously in between ALD reactions (C23C16/56 takes precedence)}
C23C16/4554 (Plasma being used non-continuously in between ald reactions) appears on 294 US grants and 397 published applications in this corpus.
Search patents in C23C- Granted patents
- 294
- Published applications
- 397
- Assignees
- 71
- Inventors
- 753
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 3 |
| 2002 | 4 | 9 |
| 2003 | 8 | 5 |
| 2004 | 1 | 7 |
| 2005 | 4 | 2 |
| 2006 | 6 | 11 |
| 2007 | 1 | 7 |
| 2008 | 4 | 9 |
| 2009 | 4 | 5 |
| 2010 | 9 | 7 |
| 2011 | 7 | 10 |
| 2012 | 9 | 11 |
| 2013 | 7 | 19 |
| 2014 | 13 | 22 |
| 2015 | 12 | 20 |
| 2016 | 17 | 16 |
| 2017 | 13 | 21 |
| 2018 | 22 | 24 |
| 2019 | 17 | 27 |
| 2020 | 26 | 26 |
| 2021 | 17 | 15 |
| 2022 | 18 | 39 |
| 2023 | 14 | 18 |
| 2024 | 13 | 21 |
| 2025 | 24 | 25 |
| 2026 | 14 | 18 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
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