Methods and systems for improved deposition products

A method of forming a thin patterned material, the method comprising:

• providing a substrate to be coated;
• and
• repeatedly performing a cycle comprising:
• exposing the substrate to a first precursor, resulting in some of the first precursor adsorbing on the substrate as an adsorbed first precursor;
• exposing the substrate to a second precursor, resulting in some of the second precursor reacting with the adsorbed first precursor to form an intermediate product on the surface;
• and
• scanning the substrate with a localized energy that is applied to the intermediate product in a specific pattern to convert a patterned portion of the intermediate product to a final product in the specific pattern, resulting in the patterned portion of the intermediate product converting to the final product with a growth-rate less than or equal to about one molecular layer of the final product per cycle,
• whereby after multiple cycles a thin pattern of the final product is formed on the substrate in the specific pattern.