B81C 1/00031
Regular or irregular arrays of nanoscale structures
Official title: {Regular or irregular arrays of nanoscale structures, e.g. etch mask layer (photomechanical, e.g. photolithographic, production of textured or patterned surfaces G03F7/00; lithographic processes for making patterned surfaces using printing and stamping G03F7/0002)}
B81C1/00031 (Regular or irregular arrays of nanoscale structures) appears on 432 US grants and 532 published applications in this corpus.
Search patents in B81C- Granted patents
- 432
- Published applications
- 532
- Assignees
- 211
- Inventors
- 1,081
- Latest grant
- 12 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 1 | 2 |
| 2003 | 2 | 4 |
| 2004 | 3 | 3 |
| 2005 | 0 | 4 |
| 2006 | 3 | 4 |
| 2007 | 1 | 8 |
| 2008 | 4 | 26 |
| 2009 | 3 | 39 |
| 2010 | 21 | 33 |
| 2011 | 11 | 34 |
| 2012 | 30 | 50 |
| 2013 | 45 | 47 |
| 2014 | 35 | 60 |
| 2015 | 61 | 48 |
| 2016 | 45 | 34 |
| 2017 | 38 | 22 |
| 2018 | 25 | 28 |
| 2019 | 18 | 21 |
| 2020 | 20 | 15 |
| 2021 | 21 | 19 |
| 2022 | 15 | 12 |
| 2023 | 9 | 6 |
| 2024 | 10 | 0 |
| 2025 | 10 | 7 |
| 2026 | 1 | 6 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Hierarchical silicon nanostructures, methods of making, and methods of use12 May 2026US 12,623,901 B2University of Florida Research Foundation, Inc.
- Method for fabricating a microfluidic device7 Oct 2025US 12,434,962 B2Imec Vzw
- High rate printing of microscale and nanoscale patterns using interfacial convective assembly16 Sep 2025US 12,415,721 B2Northeastern University
- Methods of forming nanostructures including metal oxides using block copolymer materials26 Aug 2025US 12,400,856 B2Micron Technology, Inc.
- Methods of forming nanostructures utilizing self-assembled nucleic acids29 Jul 2025US 12,374,547 B1Micron Technology, Inc.
- Microfluidic Devices and Associated Methods24 Sep 2026US 2026/0285674 A1The Texas A&M University System
- Hierarchical silicon nanostructures, methods of making, and methods of use27 Aug 2026US 2026/0250125 A1
- Method for manufacturing microstructures6 Aug 2026US 2026/0231708 A1Commissariat A L' Energie Atomique Et Aux Energies Alternatives
- Nanoscale geometrical quantity certified reference material, and preparation method and use thereof2 Jul 2026US 2026/0184560 A1National Institute of Metrology, China
- Method and device for producing nanopores30 Apr 2026US 2026/0116742 A1The University of Tokyo
Most cited
By later US patents
- Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials513US 7,115,305 B2California Institute of Technology · 2006
- Method of forming articles including waveguides via capillary micromolding and microtransfer molding512US 6,355,198 B1President and Fellows of Harvard College · 2002
- Integration of absorption based heating bake methods into a photolithography track system470US 9,613,801 B2Tokyo Electron Limited · 2017
- Methods for forming improved self-assembled patterns of block copolymers101US 7,347,953 B2International Business Machines Corporation · 2008
- Registered structure formation via the application of directed thermal energy to diblock copolymer films92US 8,083,953 B2Micron Technology, Inc. · 2011