Methods of forming nanostructures including metal oxides using block copolymer materials

A method of forming nanostructures, comprising:

• forming a block copolymer composition on a patterned material, the block copolymer composition comprising a block copolymer material and an activatable catalyst having higher affinity for a first block of the block copolymer material compared to a second block of the block copolymer material;
• self-assembling the block copolymer composition by microphase segregation into first domains comprising the first block and the activatable catalyst, and second domains comprising the second block;
• applying an activation energy to a first portion of the first domains to activate the activatable catalyst in the first portion of the first domains and to generate activated activatable catalyst;
• reacting a first metal oxide precursor with the activated activatable catalyst in the first portion of the first domains to form a first metal oxide in the first portion of the first domains comprising the first block of the block copolymer material;
• applying an activation energy to a second portion of the first domains to activate the activatable catalyst in the second portion of the first domains and to generate activated activatable catalyst, the second portion of the first domains adjacent to the first portion of the first domains;
• and
• reacting a second metal oxide precursor with the activated activatable catalyst in the second portion of the first domains to form a second metal oxide in the second portion of the first domains, the second metal oxide comprising a different metal than the first metal oxide.