H10P 72/13
Horizontal boat type carrier whereby the substrates are vertically supported
Official title: {Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements}
H10P72/13 (Horizontal boat type carrier whereby the substrates are vertically supported) appears on 271 US grants and 240 published applications in this corpus.
Search patents in H10P- Granted patents
- 271
- Published applications
- 240
- Assignees
- 170
- Inventors
- 695
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 2 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 2 | 0 |
| 1985 | 1 | 0 |
| 1986 | 5 | 0 |
| 1987 | 5 | 0 |
| 1988 | 3 | 0 |
| 1989 | 6 | 0 |
| 1990 | 1 | 0 |
| 1991 | 7 | 0 |
| 1992 | 3 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 5 | 0 |
| 1996 | 2 | 0 |
| 1997 | 5 | 0 |
| 1998 | 8 | 0 |
| 1999 | 8 | 0 |
| 2000 | 14 | 0 |
| 2001 | 13 | 4 |
| 2002 | 11 | 9 |
| 2003 | 13 | 17 |
| 2004 | 8 | 8 |
| 2005 | 8 | 6 |
| 2006 | 3 | 4 |
| 2007 | 4 | 8 |
| 2008 | 0 | 5 |
| 2009 | 1 | 12 |
| 2010 | 1 | 6 |
| 2011 | 3 | 11 |
| 2012 | 9 | 7 |
| 2013 | 8 | 6 |
| 2014 | 4 | 7 |
| 2015 | 7 | 3 |
| 2016 | 6 | 12 |
| 2017 | 2 | 8 |
| 2018 | 10 | 18 |
| 2019 | 9 | 12 |
| 2020 | 10 | 16 |
| 2021 | 8 | 12 |
| 2022 | 11 | 8 |
| 2023 | 10 | 18 |
| 2024 | 13 | 9 |
| 2025 | 6 | 4 |
| 2026 | 8 | 10 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Device for drying semiconductor substrates25 Aug 2026US 12,716,652 B2Siltronic AG
- Wafer boat and plate for wafer boat4 Aug 2026US 12,701,956 B2Hanwha Solutions Corporation
- Device for drying semiconductor substrates19 May 2026US 12,635,445 B2Siltronic AG
- Device for drying semiconductor substrates7 Apr 2026US 12,598,938 B2Siltronic AG
- Semiconductor device and methods of making and using an enhanced carrier to reduce electrostatic discharge24 Mar 2026US 12,588,463 B2STATS ChipPAC Pte. Ltd.
- Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium24 Sep 2026US 2026/0293589 A1Kokusai Electric Corporation
- Wafer boat assembly and semiconductor process equipment17 Sep 2026US 2026/0282816 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Fixture device17 Sep 2026US 2026/0282841 A1All Ring Tech Co., Ltd.
- Multi-row carrier cassette for semiconductor wafers2 Jul 2026US 2026/0190925 A1Singulus Technologies AG
- Wafer boat device and plasma dissociation furnace tube system7 May 2026US 2026/0130168 A1Metal Industries Research & Development Centre
Most cited
By later US patents
- Transfer apparatus492US 4,466,766 ARuska Instrument Corporation · 1984
- Semiconductor wafer processing apparatus having improved wafer input/output handling system485US 6,447,232 B1Semitool, Inc. · 2002
- Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations456US 9,355,876 B2APPLIED Materials.Inc. · 2016
- Apparatus and method for performing heat treatment on semiconductor wafers101US 5,001,327 AHitachi, Ltd. · 1991
- Reinforced carrier with embedded rigid insert97US 4,872,554 AFluoroware, Inc. · 1989