H10P 72/10
Handling or holding of wafers, substrates or devices during manufacture or treatment
Official title: using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
H10P72/10 (Handling or holding of wafers, substrates or devices during manufacture or treatment) appears on 3,496 US grants and 3,960 published applications in this corpus.
Search patents in H10P- Granted patents
- 3,496
- Published applications
- 3,960
- Assignees
- 1,027
- Inventors
- 7,198
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 5 | 0 |
| 1977 | 4 | 0 |
| 1978 | 3 | 0 |
| 1979 | 5 | 0 |
| 1980 | 4 | 0 |
| 1981 | 2 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 4 | 0 |
| 1985 | 7 | 0 |
| 1986 | 17 | 0 |
| 1987 | 16 | 0 |
| 1988 | 18 | 0 |
| 1989 | 23 | 0 |
| 1990 | 14 | 0 |
| 1991 | 23 | 0 |
| 1992 | 29 | 0 |
| 1993 | 25 | 0 |
| 1994 | 29 | 0 |
| 1995 | 37 | 0 |
| 1996 | 34 | 0 |
| 1997 | 28 | 0 |
| 1998 | 67 | 0 |
| 1999 | 68 | 0 |
| 2000 | 88 | 0 |
| 2001 | 84 | 30 |
| 2002 | 96 | 86 |
| 2003 | 63 | 126 |
| 2004 | 75 | 117 |
| 2005 | 65 | 120 |
| 2006 | 68 | 123 |
| 2007 | 55 | 117 |
| 2008 | 59 | 101 |
| 2009 | 53 | 133 |
| 2010 | 74 | 96 |
| 2011 | 74 | 114 |
| 2012 | 81 | 98 |
| 2013 | 78 | 120 |
| 2014 | 78 | 131 |
| 2015 | 101 | 160 |
| 2016 | 109 | 141 |
| 2017 | 128 | 166 |
| 2018 | 150 | 206 |
| 2019 | 166 | 215 |
| 2020 | 200 | 258 |
| 2021 | 159 | 236 |
| 2022 | 184 | 230 |
| 2023 | 192 | 273 |
| 2024 | 213 | 223 |
| 2025 | 205 | 196 |
| 2026 | 133 | 144 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H10P 72/19Closed carriers1,837
- H10P 72/12Vertical boat type carrier whereby the substrates are horizontally supported457
- H10P 72/16Trays for chips350
- H10P 72/18Characterised by being specially adapted for supporting a single substrate or by340
- H10P 72/14Vertical carrier comprising wall type elements whereby the substrates are horizontally supported282
- H10P 72/13Horizontal boat type carrier whereby the substrates are vertically supported271
- H10P 72/15Horizontal carrier comprising wall type elements whereby the substrates are vertically supported223
- H10P 72/17Specially adapted for supporting large square shaped substrates128
Recent patents
- Carrier tape system and methods of making and using the same6 Oct 2026US 12,753,327 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Apparatus for conducting plasma surface treatment, board treatment system having the same, and method of manufacturing semiconductor devices using the same6 Oct 2026US 12,755,942 B2New Power Plasma Co., Ltd.
- Frame cassette with internal cover cases6 Oct 2026US 12,757,677 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Packaging unit and transportation container6 Oct 2026US 12,757,678 B2Sumco Corporation
- Substrate processing tube, substrate processing apparatus including the same, and substrate processing method using the apparatus29 Sep 2026US 12,747,497 B2Samsung Electronics Co., Ltd.
- Apparatus and method for repairing defect of semiconductor8 Oct 2026US 2026/0311964 A1Tokyo Electron Limited
- Mapping device and mapping method8 Oct 2026US 2026/0314309 A1Sinfonia Technology Co., Ltd.
- Wafer transfer blade and assembly8 Oct 2026US 2026/0314311 A1Taiwan Semiconductor Manufacturing Company.Ltd
- System for detecting fluid in container for receiving semiconductor device8 Oct 2026US 2026/0314312 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Wafer container, top cover thereof, and method for managing wafer containers8 Oct 2026US 2026/0314313 A1Nanya Technology Corporation
Most cited
By later US patents
- Wafer holding, wafer support member, wafer boat and heat treatment furnace566US 7,204,887 B2Nippon Steel Corporation · 2007
- Heat treatment jig for semiconductor substrate555US 7,329,947 B2Sumitomo Mitsubishi Silicon Corporation · 2008
- Heat treatment apparatus551US 5,718,574 ATokyo Electron Limited · 1998
- Substrate supporting/transferring tray549US 7,780,440 B2Canon Anelva Corporation · 2010
- Substrate supporting/transferring tray548US 8,147,242 B2Canon Anelva Corporation · 2012