H10P 72/14
Vertical carrier comprising wall type elements whereby the substrates are horizontally supported
Official title: {Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls}
H10P72/14 (Vertical carrier comprising wall type elements whereby the substrates are horizontally supported) appears on 282 US grants and 338 published applications in this corpus.
Search patents in H10P- Granted patents
- 282
- Published applications
- 338
- Assignees
- 161
- Inventors
- 810
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 4 | 0 |
| 1996 | 2 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 6 | 0 |
| 2001 | 6 | 1 |
| 2002 | 5 | 4 |
| 2003 | 3 | 17 |
| 2004 | 8 | 10 |
| 2005 | 7 | 8 |
| 2006 | 6 | 5 |
| 2007 | 7 | 8 |
| 2008 | 1 | 5 |
| 2009 | 3 | 9 |
| 2010 | 7 | 2 |
| 2011 | 4 | 8 |
| 2012 | 4 | 4 |
| 2013 | 1 | 6 |
| 2014 | 5 | 7 |
| 2015 | 6 | 10 |
| 2016 | 4 | 12 |
| 2017 | 7 | 11 |
| 2018 | 10 | 18 |
| 2019 | 16 | 19 |
| 2020 | 18 | 27 |
| 2021 | 16 | 31 |
| 2022 | 18 | 25 |
| 2023 | 25 | 33 |
| 2024 | 19 | 24 |
| 2025 | 27 | 21 |
| 2026 | 22 | 13 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Substrate processing tube, substrate processing apparatus including the same, and substrate processing method using the apparatus29 Sep 2026US 12,747,497 B2Samsung Electronics Co., Ltd.
- Container, container partition plate, substrate processing system, and substrate transfer method29 Sep 2026US 12,751,241 B2Tokyo Electron Limited
- Purge flow distribution system for a substrate container and method for performing the same29 Sep 2026US 12,751,245 B2Entegris, Inc.
- Apparatus for treating substrate22 Sep 2026US 12,745,587 B2Semes Co., Ltd.
- Substrate storing container and lid-body-side substrate support part22 Sep 2026US 12,745,597 B2Miraial Co., Ltd.
- Wafer transport method and apparatus10 Sep 2026US 2026/0271669 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Cmp device and wafer transfer method3 Sep 2026US 2026/0262468 A1Hangzhou Sizone Electronic Technology Inc.
- Wafer handling system and method3 Sep 2026US 2026/0262478 A1Service Support Specialties, Inc.
- Storage system for storing a plurality of substrate holders23 Jul 2026US 2026/0215216 A1Lpe S.P.A.
- Cassette transport system, method for transporting cassette using the same, and electronic device16 Jul 2026US 2026/0206533 A1Samsung Display Co., Ltd.
Most cited
By later US patents
- Substrate storage cassette positioning device and method487US 6,432,849 B1Nikon Corporation · 2002
- Heat treatment jig for silicon semiconductor substrate478US 7,210,925 B2Sumitomo Mitsubishi Silicon Corporation · 2007
- Front opening ring pod128US 9,881,820 B2Lam Research Corporation · 2018
- Positioning apparatus for substrates to be processed62US 6,158,946 ATokyo Electron Limited · 2000
- Substrate surface treating apparatus and substrate surface treating method60US 5,603,777 ADainippon Screen Mfg.Co., Ltd. · 1997