Storage system for storing a plurality of substrate holders

A substrate handling platform for a reactor assembly, comprising:

• a support surface;
• at least one storage system according to any one of the preceding claims;
• at least one substrate centering unit;
• and
• at least one automatic component adapted to grab and transfer a substrate holder;
• wherein said at least one storage system, said at least one substrate centering unit, and said at least one automatic component are positioned over said support surface and are mutually arranged so that both the at least one storage system and the at least one substrate centering unit can be accessed by the at least one automatic component.

A reactor assembly comprising:

• at least one substrate handling platform according to claim;
• a reactor for the deposition of semiconductor films on a substrate comprising at least one reaction chamber;
• at least one load-lock chamber for conditioning substrates;
• at least one transfer chamber connected to the reaction chamber and to the load-lock chamber;
• and
• wherein the transfer chamber comprises at least one automatic component for placing a substrate holder, in and out of the reaction chamber.