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US 6,432,849 B1Granted
Substrate storage cassette positioning device and method
AssigneeNikon Corporation
InventorsYutaka Endo, Nobuyoshi Tanno
Life of this patent
Estimating the term…
Abstract
A substrate storage cassette positioning device and method for positioning a substrate storage cassette in a predetermined location on an installation platform, comprising a guide section for guiding the substrate storage cassette into a predetermined location during the positioning of the substrate storage cassette.
Claims16
A substrate storage cassette positioning device for positioning a substrate storage cassette in a predetermined location on an installation platform, comprising:
- a guide section disposed on said installation platform to guide said substrate storage cassette into said predetermined location during the positioning of said substrate storage cassette;
- and
- a positioning section disposed on said installation platform to position said substrate storage cassette in said predetermined location, a position of said positioning section on said installation platform being different from a position of said guide section on said installation platform.
A method of transporting a substrate storage cassette to a predetermined location on an installation platform, comprising:
- bringing into contact a peripheral surface of said substrate storage cassette and an attached member provided on said installation platform;
- moving said substrate storage cassette near said predetermined location;
- and
- engaging a first engagement member provided on said substrate storage cassette and a second engagement member provided on said installation platform, a position of said second engagement member being different from a position of said attached member.
1 more element
Dependencies are inferred from the claim text.