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US 2026/0271669 A1Published application
Wafer transport method and apparatus
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKai-Hung HSIAO, Chih-Hsiung HUANG, Chi-Chung JEN, Yuan-Cheng KUO, Yu-Chun SHEN, Wen-Chih CHIANG
Life of this patent
Estimating the term…
Abstract
A wafer container includes a frame, a door and at least a pair of shelves. The frame has opposite sidewalls. The pair of the shelves are respectively disposed and aligned on the opposite sidewalls of the frame. Various methods and devices are provided for holding at least one wafer to the shelves during transport.
Claims20
A wafer container apparatus, comprising:
- a pair of shelves disposed on sidewalls of the wafer container apparatus, wherein the pair of shelves includes at least one engagement arm configured to secure a wafer;
- and
- a settler for securing the wafer on the pair of shelves by gripping an edge of the wafer, wherein the settler includes at least one movable contact member disposed at an interior end of the pair of shelves configured to transition from a first position to a second position to grip the edge of the wafer.
An apparatus for carrying wafers, comprising:
- a first shelf disposed on a first sidewall of the apparatus;
- a second shelf disposed on a second sidewall of the apparatus facing the first sidewall of the apparatus and separated by a distance from the first shelf, the first shelf and the second shelf configured to cooperatively support a wafer;
- a third shelf disposed on a third sidewall between the first sidewall and the second sidewall;
- a securing arm disposed towards an interior end of the third shelf;
- and
- an adjuster configured to change a position of the securing arm in order to secure the wafer by gripping an edge of the wafer.
3 more elements
A method for securing a wafer within a wafer container, comprising:
- robotically inserting a wafer onto a shelf disposed within the wafer container;
- adjusting a position of a securing arm disposed on the shelf, the securing arm configured to secure the wafer by gripping an edge of the wafer, wherein the securing arm includes at least one movable contact member disposed at an interior end of the shelf configured to transition from a first position to a second position to grip the edge of the wafer;
- and
- measuring the position of the securing arm.
1 more element
Dependencies are inferred from the claim text.