Substrate processing tube, substrate processing apparatus including the same, and substrate processing method using the apparatus
AssigneeSamsung Electronics Co., Ltd.
InventorsHyunju Lee, Byeonghoon Kim, Hyouncheol Kim, Jaehyung Lee, Byunghwan Kong
Life of this patent
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Abstract
A substrate processing apparatus may include an inner tube providing a process space extending vertically, an outer tube enclosing the inner tube, a gas supplying conduit connected to the process space, and a boat configured to be disposed in the process space. A first inner diameter of the inner tube at a first position may be different from a second inner diameter of the inner tube at a second position, and a level of the second position may be higher than a level of the first position.
Claims20
A substrate processing apparatus, comprising:
- an inner tube providing a process space extending vertically;
- an outer tube enclosing the inner tube;
- a gas supplying conduit connected to the process space;
- and
- a boat configured to be disposed in the process space,
- wherein a first inner diameter of the inner tube at a first position is different from a second inner diameter of the inner tube at a second position,
- wherein a level of the second position is higher than a level of the first position, and
- wherein, in a horizontal cross-section at the second position, an inner circumference of the inner tube has a circular shape along an entire perimeter of the inner tube, and
- wherein the level of the second position is within a vertical extent of the boat.
A substrate processing tube, comprising:
- a first inner tube providing a first process space configured such that a deposition process on a first substrate is performed in the first process space;
- and
- a second inner tube providing a second process space configured such that a deposition process on a second substrate is performed in the second process space,
- wherein the first process space extends in a vertical direction,
- wherein the second process space is connected to the first process space and extends from the first process space in the vertical direction,
- wherein the second process space comprises a first region whose horizontal width is different from a horizontal width of the first process space, and
- wherein, in a horizontal cross-section, the second inner tube has a circular inner circumference extending along an entire perimeter of the second inner tube.
A substrate processing apparatus, comprising:
- an inner tube providing a process space which extends in a first direction;
- an outer tube enclosing the inner tube and extending in the first direction;
- a gas supplying conduit connected to the process space;
- and
- a boat configured to move in and to move out of the process space,
- wherein, when the boat is placed in the process space, a first horizontal distance between the boat and an inner side surface of the inner tube at a first position is different from a second horizontal distance between the boat and the inner side surface of the inner tube at a second position,
- wherein the second position is spaced apart from the first position in the first direction, and
- wherein a horizontal cross-section of the inner side surface of the inner tube at the second position has a circular shape.
Dependencies are inferred from the claim text.