Multi-row carrier cassette for semiconductor wafers

A carrier cassette for wafers, comprising:

• two side plates facing each other in a first direction, each of which comprises a locking groove on an upper side of the same;
• at least one lower retaining rod mounted between the two opposing side plates, and at least two lateral retaining rods mounted between the two opposing side plates,
• an upper locking rod that can be locked in the locking grooves of the opposing side plates to hold down wafers in the carrier cassette,
• wherein
• the side plates the at least one lower retaining rod, the at least two lateral retaining rods and the upper locking rod define two receiving areas for two rows of wafers extending in the first direction, the two receiving areas being arranged next to each other in a second direction perpendicular to the first direction, and
• the upper locking rod is configured to hold down the two rows of wafers and comprises projections that are configured to separate wafers of both rows adjacent in the first direction from each other when the upper locking rod is locked in the locking grooves.