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AssigneeKokusai Electric Corporation
InventorsKatsuji OSHIDA, Kaoru YAMAMOTO, Toshiro KOSHIMAKI
Estimating the term…
It is possible to prevent damage to a quartz structure inside a process vessel. There is provided a technique that includes: a process vessel of a tubular shape where substrates supported by a boat are accommodated and collectively processed; a mover for moving the boat in an axial direction of the process vessel; a camera outside the process vessel for imaging inside of the process vessel in a state where one end of the process vessel is open and at least a part of the boat is unloaded from the process vessel; and a determination processor causing the camera to capture an image of the inside of the process vessel in a state where the boat unloaded by the mover is located at the one end of the process vessel, and determining a presence or absence of an abnormality and/or a degree of the abnormality from the image captured.
A substrate processing apparatus comprising:
A substrate processing method comprising:
A non-transitory computer-readable recording medium storing a program that causes a substrate processing apparatus, by a computer, to perform:
Dependencies are inferred from the claim text.