Reinforced carrier with embedded rigid insert
AssigneeFluoroware, Inc.
InventorDaniel R. Quernemoen
Life of this patent
Estimating the term…
Abstract
A carrier for silicon wafers and the like for use in processing wafers, the carrier having side components and end components, the side components being tubular rails with wafer spacing and supporting teeth projecting therefrom, the side rails being of tubular plastic and having rigid inserts or rods embedded therein, the end components of the carrier being generally panel shaped and having rigid inserts or panels embedded therein, the inserts, in either rod form or panel form being formed of rigid material which is highly stable and resistant to the influences of high temperatures and strong chemicals to maintain its shape and structural integrity and formed of any of a number of materials such as quartz, ceramics, glass, and metals resistant to corrosion such as stainless steel.
Claims16
A rigid carrier for retaining a multiplicity of thin wafers in closely spaced but continuously separated confronting relation to each other and in a stack-like arrangement to accommodate liquid and gaseous spray processing and the many high and low temperature processing steps of the wafers in the production of circuit chips from the wafers, comprising
- a plurality of plastic structural components adjacent each other and affixed together and arranged to define an integral one-piece rigid container to embrace and confine the wafers, said structural components being widely spaced from each other to permit more open space for access by liquid and gaseous sprays to the wafers confined, certain of said structural components having a multiplicity of teeth formed integrally therewith and projecting inwardly of the certain components to support and space the wafers, adjacent teeth of a said structural component being spaced the width of one of said wafers,
- and a rigid insert completely embedded in one of said structural components and stiffening the component, said insert being formed of a material which is highly resistant to the influences of temperature in maintaining its shape and rigidity to minimize flexing or deformation of the structural components and the carrier.
A rigid carrier for retaining a multiplicity of thin wafers in closely spaced but continuously separated confronting relation to each other and in a stack-like arrangement to accommodate liquid and gaseous spray processing and the many high and low temperature processing steps of the wafers in the production of circuit chips from the wafers, comprising
- a plurality of plastic structural components adjacent each other and affixed together and arranged to define an integral one-piece rigid container to embrace and confine the wafers, said structural components being widely spaced from each other to permit more open space for access by liquid and gaseous sprays to the wafers confined, wherein said structural components include end components and elongate side components affixed to each other, the side components traversing the edges of the wafers in the stack-like arrangement, said side components having a multiplicity of teeth formed integrally therewith and projecting inwardly of the side components to support and space the wafers, adjacent teeth of a said side component being spaced the width of one of said wafers, and the end components confronting the faces of the wafers,
- and a rigid insert completely embedded in one of said structural components and stiffening the component, said insert being formed of a material which is highly resistant to the influences of temperature in maintaining its shape and rigidity to minimize flexing or deformation of the structural components and the carrier.
A rigid carrier for retaining a multiplicity of thin wafers in closely spaced but continuously separated confronting relation to each other and in a stack-like arrangement to accommodate liquid and gaseous spray processing and the many high and low temperature processing steps of the wafers in the production of circuit chips from the wafers, comprising
- a plurality of plastic structural components adjacent each other and affixed together and arranged to define an integral one-piece rigid container to embrace and confine the wafers, said structural components being widely spaced from each other to permit more open space for access by liquid and gaseous sprays to the wafers confined, wherein said structural components include end components and elongate side components affixed to each other, the side components traversing the edges of the wafers in the stack-like arrangement, said side components each being substantially tubular and having a multiplicity of teeth formed integrally therewith projecting inwardly of the side components to support and space the wafers, adjacent teeth of a said side component being spaced the width of one of said wafers, and the end components each being generally panel shaped and including an interior chamber and the end components confronting the faces of the wafers and being affixed to the side components,
- and a rigid insert completely embedded in one of said structural components and stiffening the component, said insert being formed of a material which is highly resistant to the influences of temperature in maintaining its shape and rigidity to minimize flexing or deformation of the structural components and the carrier.
Dependencies are inferred from the claim text.