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US 12,701,956 B2Granted
Wafer boat and plate for wafer boat
AssigneeHanwha Solutions Corporation
InventorKyoungsup Shin
Life of this patent
Estimating the term…
Abstract
A wafer boat according to an aspect of the present invention includes: at least one plate on which a plurality of wafers are loaded; and a plurality of pin pairs that are arranged along a first direction from the at least one plate and respectively support corresponding wafers among the plurality of wafers.
Claims15
A wafer boat, comprising:
- at least one plate on which a plurality of wafers are loaded;
- and
- a plurality of pin pairs arranged in the at least one plate along a first direction and each of the plurality of pin pairs supporting a corresponding wafer among the plurality of wafers, wherein
- pins of any one pin pair of the plurality of pin pairs are located to have a separation distance (DT) satisfying the following equation:
- DT
- =
- da
- 2
- +
- db
- 2
- ,
- (
- Lw
-
- (
- 1
- 2
- +
- tan
-
- θ
-
- t
- )
- ≤
- da
- <
- Lw
- ,
- Lw
-
- (
- 1
- 2
- -
- tan
-
- θ
-
- t
- )
- ≤
- db
- <
- Lw
- )
- ,
- where, da is a distance from a vertex closest to a lower edge of the plate among the vertexes of the corresponding wafer to any one of the pins, db is a distance from the vertex to the other pin, Lw is a length of one side of the corresponding wafer, and Ot is an angle of inclination of the corresponding wafer.
46 more elements
A plate on which a plurality of wafers are loaded, the plate comprising:
- a plurality of pin pairs arranged along a direction in which the plurality of wafers are arranged in the plate and each of the plurality of pin pairs supporting a corresponding wafer among the plurality of wafers in a direction different from the direction in which the plurality of wafers are arranged, wherein
- pins of any one pin pair of the plurality of pin pairs are located to have a separation distance (DT) satisfying the following equation:
- DT
- =
- da
- 2
- +
- db
- 2
- ·
- (
- Lw
-
- (
- 1
- 2
- +
- tan
-
- θ
-
- t
- )
- ≤
- da
- <
- Lw
- ,
- Lw
-
- (
- 1
- 2
- +
- tan
-
- θ
-
- t
- )
- ≤
- db
- <
- Lw
- )
- ,
- [
- Equation
- ]
- where, da is a distance from a vertex closest to a lower edge of the plate among the vertexes of the corresponding wafer to any one of the pins, db is a distance from the vertex to the other pin, Lw is a length of one side of the corresponding wafer, and Ot is an angle of inclination of the corresponding wafer.
47 more elements
Dependencies are inferred from the claim text.