H10P 72/0608
Of substrates stored in a container, a magazine, a carrier, a boat
Official title: {of substrates stored in a container, a magazine, a carrier, a boat or the like}
H10P72/0608 (Of substrates stored in a container, a magazine, a carrier, a boat) appears on 479 US grants and 559 published applications in this corpus.
Search patents in H10P- Granted patents
- 479
- Published applications
- 559
- Assignees
- 205
- Inventors
- 1,171
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1984 | 1 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 1 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 4 | 0 |
| 1994 | 1 | 0 |
| 1995 | 5 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 2 | 0 |
| 1999 | 6 | 0 |
| 2000 | 7 | 0 |
| 2001 | 9 | 8 |
| 2002 | 14 | 7 |
| 2003 | 10 | 16 |
| 2004 | 13 | 27 |
| 2005 | 8 | 11 |
| 2006 | 18 | 10 |
| 2007 | 9 | 20 |
| 2008 | 4 | 17 |
| 2009 | 9 | 11 |
| 2010 | 10 | 22 |
| 2011 | 15 | 10 |
| 2012 | 15 | 12 |
| 2013 | 7 | 11 |
| 2014 | 16 | 15 |
| 2015 | 9 | 11 |
| 2016 | 17 | 13 |
| 2017 | 12 | 28 |
| 2018 | 24 | 32 |
| 2019 | 24 | 34 |
| 2020 | 41 | 40 |
| 2021 | 27 | 32 |
| 2022 | 26 | 34 |
| 2023 | 23 | 36 |
| 2024 | 27 | 35 |
| 2025 | 30 | 31 |
| 2026 | 25 | 36 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Container, container partition plate, substrate processing system, and substrate transfer method29 Sep 2026US 12,751,241 B2Tokyo Electron Limited
- Apparatus for treating substrate22 Sep 2026US 12,745,587 B2Semes Co., Ltd.
- Apparatus for treating substrate and method for treating substrate8 Sep 2026US 12,733,439 B2Semes Co., Ltd.
- Systems and methods for semiconductor wafer transport18 Aug 2026US 12,713,871 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Magnetic sensor assembly11 Aug 2026US 12,703,586 B2APPLIED Materials.Inc.
- Mapping device and mapping method8 Oct 2026US 2026/0314309 A1Sinfonia Technology Co., Ltd.
- Method for mapping wafers in a wafer carrier1 Oct 2026US 2026/0305232 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Load port, abnormal state determination method, and storage medium1 Oct 2026US 2026/0305244 A1Hirata Corporation
- Deployment method for consistent positioning results across multiple apparatuses and method for improving positioning performance thereof24 Sep 2026US 2026/0293588 A1Chroma Ate Inc.
- Foup positional calibration device24 Sep 2026US 2026/0293597 A1Nanoverse Technologies Ltd
Most cited
By later US patents
- Wafer-mapping load post interface having an effector position sensing device546US 6,013,920 AFortrend Engineering Coirporation · 2000
- System and method for on-the-fly eccentricity recognition543US 6,990,430 B2Brooks Automation, Inc. · 2006
- Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same540US 7,618,226 B2ASM Japan K .K. · 2009
- Process apparatus with on-the-fly workpiece centering540US 7,925,378 B2Brooks Automation, Inc. · 2011
- Position sensor system for substrate transfer robot532US 8,041,450 B2ASM Japan K .K. · 2011