H10P 72/0606
Position monitoring
Official title: {Position monitoring, e.g. misposition detection or presence detection}
H10P72/0606 (Position monitoring) appears on 2,109 US grants and 2,681 published applications in this corpus.
Search patents in H10P- Granted patents
- 2,109
- Published applications
- 2,681
- Assignees
- 606
- Inventors
- 5,206
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 1 | 0 |
| 1985 | 3 | 0 |
| 1986 | 0 | 0 |
| 1987 | 4 | 0 |
| 1988 | 3 | 0 |
| 1989 | 6 | 0 |
| 1990 | 2 | 0 |
| 1991 | 4 | 0 |
| 1992 | 2 | 0 |
| 1993 | 10 | 0 |
| 1994 | 5 | 0 |
| 1995 | 9 | 0 |
| 1996 | 5 | 0 |
| 1997 | 8 | 0 |
| 1998 | 16 | 0 |
| 1999 | 25 | 0 |
| 2000 | 31 | 0 |
| 2001 | 32 | 14 |
| 2002 | 46 | 48 |
| 2003 | 53 | 79 |
| 2004 | 57 | 74 |
| 2005 | 48 | 75 |
| 2006 | 52 | 33 |
| 2007 | 29 | 50 |
| 2008 | 25 | 48 |
| 2009 | 23 | 46 |
| 2010 | 31 | 57 |
| 2011 | 28 | 30 |
| 2012 | 40 | 43 |
| 2013 | 32 | 50 |
| 2014 | 46 | 41 |
| 2015 | 37 | 65 |
| 2016 | 63 | 75 |
| 2017 | 65 | 109 |
| 2018 | 85 | 129 |
| 2019 | 111 | 154 |
| 2020 | 151 | 191 |
| 2021 | 140 | 194 |
| 2022 | 127 | 221 |
| 2023 | 147 | 209 |
| 2024 | 186 | 235 |
| 2025 | 186 | 227 |
| 2026 | 134 | 184 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Apparatus and method for dispensing treatment liquid29 Sep 2026US 12,751,239 B2Semes Co., Ltd.
- Container, container partition plate, substrate processing system, and substrate transfer method29 Sep 2026US 12,751,241 B2Tokyo Electron Limited
- Apparatus for treating substrate22 Sep 2026US 12,745,587 B2Semes Co., Ltd.
- Detection of a position of a wafer within a transfer robot vacuum chamber22 Sep 2026US 12,745,593 B2Tower Semiconductor Ltd.
- Reticle exchange device with reticle levitation22 Sep 2026US 12,745,594 B2Massachusetts Institute of Technology
- Substrate processing apparatus8 Oct 2026US 2026/0314305 A1Ebara Corporation
- Mapping device and mapping method8 Oct 2026US 2026/0314309 A1Sinfonia Technology Co., Ltd.
- Wafer container, top cover thereof, and method for managing wafer containers8 Oct 2026US 2026/0314313 A1Nanya Technology Corporation
- Bonding apparatus, bonding system, and bonding method1 Oct 2026US 2026/0305226 A1Tokyo Electron Limited
- Device and method for manufacturing display panel, and method of manufacturing electronic device including display panel1 Oct 2026US 2026/0305228 A1Samsung Display Co., Ltd.
Most cited
By later US patents
- Wafer out-of-pocket detection method571US 6,274,878 B1APPLIED Materials.Inc. · 2001
- Semiconductor process chamber vision and monitoring system555US 8,726,837 B2APPLIED Materials.Inc. · 2014
- Wafer-mapping load post interface having an effector position sensing device546US 6,013,920 AFortrend Engineering Coirporation · 2000
- System and method for on-the-fly eccentricity recognition543US 6,990,430 B2Brooks Automation, Inc. · 2006
- Method and apparatus for transferring wafers between cassettes and a boat541US 4,770,590 ASilicon Valley Group, Inc. · 1988