Apparatus and method for dispensing treatment liquid

A method of dispensing treatment liquid, comprising:

• seating a substrate on a substrate support;
• measuring, by a three-dimensional measurement device, the substrate seated on the substrate support;
• first receiving, at a controller, measured three-dimensional substrate information of the substrate from the three-dimensional measurement device, generating printing pattern image information based on the measured three-dimensional substrate information, and applying printing command information to a head unit according to the generated printing pattern image information;
• and
• first dispensing, at the head unit, treatment liquid onto the substrate according to the printing command information, the first dispensing including adjusting, by the controller, a head movement speed of the head unit, based on the printing command information, as the head unit is dispensing the treatment liquid.

An apparatus for dispensing treatment liquid, comprising:

• a substrate support configured to hold a substrate;
• a three-dimensional measurement device configured to three-dimensionally measure the substrate on the substrate support;
• a head unit configured to dispense treatment liquid onto the substrate seated on the substrate support;
• a first moving unit configured to move the head unit and the three-dimensional measurement device in a first direction;
• a second moving unit configured to move the head unit and the three-dimensional measurement device in a second direction;
• and
• a controller configured to receive measured three-dimensional substrate information of the substrate from the three-dimensional measurement device, generate printing pattern image information based on the measured three-dimensional substrate information, and apply printing command information to the head unit according to the generated printing pattern image information, the controller being configured to adjust a head movement speed of the head unit, based on printing command information, as the head unit is dispensing the treatment liquid,
• wherein the three-dimensional measurement device is an optical measurement device configured to emit a first incident light to a first portion having a first height, formed on the substrate, and analyze characteristics of a first reflected light produced at the first portion to obtain measured three-dimensional substrate information of the first portion and emit a second incident light to a second portion having a second height different from the first height, formed on the substrate, and analyze characteristics of a second reflected light produced at the second portion to obtain the actually measured three-dimensional substrate information of the second portion.