Deployment method for consistent positioning results across multiple apparatuses and method for improving positioning performance thereof

A deployment method for consistent positioning results across multiple apparatuses, comprising:

• performing a method for improving positioning performance by a plurality of testing apparatuses each comprising a movement device and an imaging device based on a standard sheet configured to include a plurality of reference marks arranged in an array, to obtain a coordinate compensation information table corresponding to each of the testing apparatuses, wherein each of the testing apparatuses performs position compensation control according to the corresponding coordinate compensation information table when driven based on a recipe,
• wherein, each of the testing apparatuses is configured to drive a wafer carrier of the movement device such that at least a portion of the standard sheet carried by the wafer carrier is able to enter a field of view of the imaging device, and the method for improving positioning performance performed by each of the testing apparatuses comprises:
• a positioning step of aligning a reference position on the standard sheet with a baseline position of the field of view;
• a rotation correction step of rendering, based on a geometric relation formed by at least two of the reference marks arranged in a same column or a same row, the standard sheet to a state without rotational deviation;
• and
• a coordinate compensation information establishment step of obtaining corresponding offset information of the wafer carrier in each of a plurality of target coordinates to establish the coordinate compensation information table corresponding to the testing apparatus, wherein, when the wafer carrier is driven to sequentially align the baseline position with the target coordinates as driving destinations and has arrived at the driving destination of one of the target coordinates, a target position of the target coordinate in an image of the field of view is obtained based on distance information among the reference marks, and an offset amount between the target position and the baseline position in the field of view is used as the corresponding offset information.