Magnetic sensor assembly
AssigneeApplied Materials, Inc.
InventorsClemens Pihan, Sven Langhoff
Life of this patent
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Abstract
A magnetic sensor comprises a base, at least one magnet, a first sensor element, and a second sensor element. The base including a first side and a second side. The at least one magnet disposed over the first side of the base, the at least one magnet generating magnetic flux. The first sensor element and the second sensor element being disposed over the second side, wherein the first sensor element and second sensor element are configured to measure magnetic flux density, and the magnetic flux generated by the at least one magnet is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.
Claims20
A magnetic sensor, comprising:
- a base including a first side and a second side;
- at least one magnet disposed over the first side of the base, the at least one magnet generating magnetic flux;
- and
- a first sensor element and a second sensor element disposed over the second side, wherein the first sensor element and second sensor element are configured to measure magnetic flux density, and the magnetic flux generated by the at least one magnet is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.
A magnetic levitation actuator assembly, comprising:
- a linear stator;
- a magnetic sensor positioned adjacent to the linear stator, wherein the magnetic sensor comprises:
- at least one magnet disposed on a first side of a base, the at least one magnet generating a magnetic flux;
- and
- a first sensor element and a second sensor element disposed on a second side of the base,
- wherein:
- the first sensor element and second sensor element are configured to measure magnetic flux density, and
- the magnetic flux generated by the at least one magnet is configured to pass through the first sensor element in a first direction and pass through the second sensor element in a second direction that is opposite to the first direction.
A method of controlling a carrier, comprising:
- actuating linear stators to levitate a carrier underneath a membrane and a sensor, the sensor including a magnet disposed on a first side of a base and a first sensor element and a second sensor element disposed on a second side of the base;
- and
- determining a distance between the membrane and the carrier levitated below the membrane, wherein determining the distance includes:
- detecting a magnetic flux density using the first sensor element and the second sensor element, wherein the first sensor element and second sensor element detect magnetic flux density in a horizontal direction;
- and
- generating a voltage signal based on the detected magnetic flux density;
- inputting the voltage signal and outputting the distance that is indexed to the voltage signal.
Dependencies are inferred from the claim text.