H10P 72/0458
Vertical arrangement
Official title: {vertical arrangement}
H10P72/0458 (Vertical arrangement) appears on 764 US grants and 969 published applications in this corpus.
Search patents in H10P- Granted patents
- 764
- Published applications
- 969
- Assignees
- 117
- Inventors
- 1,413
- Latest grant
- 29 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 2 | 0 |
| 1997 | 5 | 0 |
| 1998 | 6 | 0 |
| 1999 | 10 | 0 |
| 2000 | 15 | 0 |
| 2001 | 24 | 11 |
| 2002 | 18 | 24 |
| 2003 | 21 | 16 |
| 2004 | 10 | 22 |
| 2005 | 14 | 27 |
| 2006 | 9 | 50 |
| 2007 | 16 | 39 |
| 2008 | 20 | 44 |
| 2009 | 14 | 30 |
| 2010 | 30 | 27 |
| 2011 | 32 | 28 |
| 2012 | 24 | 34 |
| 2013 | 20 | 28 |
| 2014 | 22 | 26 |
| 2015 | 29 | 20 |
| 2016 | 24 | 31 |
| 2017 | 14 | 23 |
| 2018 | 23 | 45 |
| 2019 | 24 | 54 |
| 2020 | 41 | 60 |
| 2021 | 55 | 69 |
| 2022 | 49 | 58 |
| 2023 | 51 | 77 |
| 2024 | 46 | 51 |
| 2025 | 64 | 35 |
| 2026 | 26 | 40 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Storage and transfer module and substrate treatment apparatus including storage and transfer module29 Sep 2026US 12,748,355 B2Semes Co., Ltd.
- Apparatus for treating substrate22 Sep 2026US 12,745,587 B2Semes Co., Ltd.
- Substrate processing apparatus4 Aug 2026US 12,701,947 B2Ebara Corporation
- Heating unit, substrate treating apparatus including the same, method of controlling heating unit4 Aug 2026US 12,701,952 B2Semes Co., Ltd.
- Apparatus and method of treating substrate26 May 2026US 12,642,036 B2Semes Co., Ltd.
- Semiconductor Thermal Processing Apparatus and Method for Transferring Workpieces by Carrier Device Thereof8 Oct 2026US 2026/0314307 A1Beijing Naura Microelectronics Equipment Co., Ltd.
- Processing apparatus for substrate1 Oct 2026US 2026/0297749 A1Nexusbe Co., Ltd
- Substrate processing apparatus and method for controlling substrate processing apparatus24 Sep 2026US 2026/0293581 A1SCREEN Holdings Co., Ltd.
- Substrate processing apparatus, processing liquid supply device, substrate processing method and processing liquid supply method27 Aug 2026US 2026/0255911 A1SCREEN Holdings Co., Ltd.
- Substrate transfer method, substrate processing apparatus, and program13 Aug 2026US 2026/0235967 A1Tokyo Electron Limited
Most cited
By later US patents
- Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber658US 6,315,512 B1Mattson Technology, Inc. · 2001
- Processing system and method for treating a substrate558US 7,651,583 B2Tokyo Electron Limited · 2010
- Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing495US 6,503,365 B1Samsung Electronics Co., Ltd. · 2003
- Substrate processing system494US 5,826,129 ATokyo Electron Kyushu Limited · 1998
- Substrate processing system, coating/developing apparatus, and substrate processing apparatus485US 7,379,785 B2Tokyo Electron Limited · 2008