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AssigneesTokyo Electron Limited, Tokyo Electron Kyushu Limited
InventorsKeizo Hasebe, Shinji Nagashima, Norio Semba, Masami Akimoto, Yoshio Kimura, Naruaki Iida, Kouji Harada, Issei Ueda, Nobuo Konishi
Estimating the term…
This invention provides a substrate processing system including a cassette station on which at least one cassette containing a plurality of objects is placed, a process station including a plurality of process chambers for performing processing for the objects, and an object conveying unit for loading the objects into the process chambers and unloading the objects from the process chambers, a first object transfer unit for transferring the objects between the cassette station and the process station, and an interface section including an object waiting region where the objects wait, and a second object transfer unit for transferring the objects to the process station, wherein the process chambers in the process station are arranged around the object conveying unit, and the object conveying unit has a rotating shaft almost parallel to the vertical direction and can move up and down in the vertical direction along the rotating shaft and rotate about the rotating shaft.
A substrate processing system comprising:
A substrate processing method comprising the steps of:
A substrate processing method, comprising the steps of:
Dependencies are inferred from the claim text.