Systems and methods for robotic transfer of workpieces between a storage area and a processing chamber

A workpiece processing system comprising:

• a first storage chamber and a second storage chamber;
• a transport chamber adjacent to the first storage chamber and the second storage chamber;
• a processing chamber for processing workpieces, the processing chamber adjacent to the transport chamber;
• a transport robot within the transport chamber, the transport robot comprising:
• a rotable shaft;
• a first robot arm and a second robot arm operationally coupled to the shaft;
• and
• wherein the shaft is configured in a first rotational position to move vertically to allow access to the first storage chamber by the transport robot when the shaft is in a first vertical position, and to allow access to the second storage chamber by the transport robot when the shaft is in the first rotational position and a second vertical position.

A workpiece processing system comprising:

• a storage area for storing workpieces;
• a processing chamber for processing workpieces;
• a transport robot adjacent to the storage area and the processing chamber, the transport robot comprising:
• a first robot arm for transporting a workpiece, the first robot arm operationally coupled to a first shaft, the first shaft configured to extend and retract the first robot arm;
• a second robot arm for transporting a workpiece, the second robot arm operationally coupled to a second shaft, the second shaft configured to extend and retract the second robot arm;
• a third shaft operationally coupled to the first shaft and the second shaft, the third shaft having a first rotational position and a second rotational position, the third shaft configured to rotate the first robot arm and the second robot arm between the first rotational position and the second rotational position;
• and
• wherein the first robot arm and the second robot arm each include a distal rotational joint coupled to a central portion of a split support structure, the split support structure having a first paddle and a second paddle for supporting work pieces coupled to respective ends of the split support structure such that each of the first and the second robot arms are configured to support two workpieces.

A workpiece processing system comprising:

• a storage area for storing workpieces;
• a processing chamber for processing workpieces;
• a transport robot adjacent to the storage area and the processing chamber, the transport robot comprising:
• a shaft:
• a first robot arm and a second robot arm operationally coupled to the shaft, the first robot arm and the second robot arm each including at least one paddles for supporting a first and a second workpiece, the paddles of the second robot arm being positioned lower than the paddles of the first robot arm;
• wherein the first robot arm and the second robot arm each have a plurality of rotational joints such that the first robot arm and the second robot arm are extensible toward the storage area when the shaft is in a first position and toward the processing chamber when the shaft is in a second position;
• and
• wherein at least a portion of the first robot arm is configured to pass over at least one of the paddles of the second robot arm without any of the rotational joints of the first robot arm passing over the paddles of the second robot arm.

A workpiece processing system comprising:

• a processing chamber for processing workpieces;
• a transport chamber adjacent to the processing chamber;
• a first storage chamber positioned above, and in substantial vertical alignment with, a second storage chamber, each of the first and the second storage chambers having a separate door for independently isolating the respective storage chamber from the transport chamber;
• a transport robot disposed within the transport chamber, the transport robot comprising:
• a rotable shaft configured to rotate between a first rotational position and a second rotational position;
• a first robot arm configured to linearly extend and retract a first and a second paddle to access the processing chamber when the rotable shaft is in the first rotational position and to access the first and the second storage chambers when the shaft is in the second rotational position, the first robot arm comprising:
• a first base member and a second base member substantially parallel to the first base member, each of the first and the second base members having one end coupled to the rotable shaft and another end coupled to a first and a second rotational joint, respectively;
• and
• a first fore member and a second fore member substantially parallel to the first fore member, each of the first and the second fore members having one end coupled to the first and the second rotational joint, respectively, and another end coupled to a central portion of a first split support member, the first and the second paddles coupled to respective ends of the first split support structure such that the first robot arm is configured to support two workpieces;
• a second robot arm configured to linearly extend and retract a third and a fourth paddle to access the processing chamber when the rotable shaft is in the first rotational position and to access the first and the second storage chambers when the shaft is in the second rotational position, the second robot arm comprising:
• a third base member and a fourth base member substantially parallel to the third base member, each of the third and the fourth base members having one end coupled to the rotable shaft and another end coupled to a third and a fourth rotational joint, respectively;
• and
• a third fore member and a fourth fore member substantially parallel to the third fore member, each of the third and the fourth fore members having one end coupled to the third and the fourth rotational joint, respectively, and another end coupled to a central portion of a second split support member, the third and the fourth paddles coupled to respective ends of the second split support structure such that the second robot arm is configured to support two workpieces;
• wherein the first and the second paddles of the first robot arm are extended and retracted in a plane below the plane in which the third and the fourth paddles of the second robot arm are extended and retracted, the first and the second paddles positioned such that the first and the second paddles do not pass under any of the rotational joints of the second robot arm as the first and the second robot arms are extended and retracted;
• and
• wherein the transport robot switches between accessing the first and the second storage chambers in the second rotational position by moving the shaft between a first and a second vertical position.