H01J 37/3175
Projection methods, i.e. transfer substantially complete pattern to substrate
Official title: {Projection methods, i.e. transfer substantially complete pattern to substrate}
H01J37/3175 (Projection methods, i.e. transfer substantially complete pattern to substrate) appears on 189 US grants and 132 published applications in this corpus.
Search patents in H01J- Granted patents
- 189
- Published applications
- 132
- Assignees
- 70
- Inventors
- 286
- Latest grant
- 30 Sep 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 1 | 0 |
| 1982 | 2 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 2 | 0 |
| 1987 | 3 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 5 | 0 |
| 1991 | 1 | 0 |
| 1992 | 3 | 0 |
| 1993 | 3 | 0 |
| 1994 | 2 | 0 |
| 1995 | 3 | 0 |
| 1996 | 3 | 0 |
| 1997 | 3 | 0 |
| 1998 | 2 | 0 |
| 1999 | 1 | 0 |
| 2000 | 5 | 0 |
| 2001 | 5 | 1 |
| 2002 | 6 | 1 |
| 2003 | 5 | 10 |
| 2004 | 7 | 12 |
| 2005 | 9 | 7 |
| 2006 | 6 | 9 |
| 2007 | 7 | 2 |
| 2008 | 4 | 2 |
| 2009 | 5 | 3 |
| 2010 | 5 | 0 |
| 2011 | 1 | 4 |
| 2012 | 3 | 3 |
| 2013 | 3 | 5 |
| 2014 | 6 | 10 |
| 2015 | 10 | 16 |
| 2016 | 11 | 7 |
| 2017 | 7 | 5 |
| 2018 | 5 | 5 |
| 2019 | 6 | 7 |
| 2020 | 7 | 5 |
| 2021 | 5 | 7 |
| 2022 | 6 | 4 |
| 2023 | 7 | 3 |
| 2024 | 2 | 2 |
| 2025 | 3 | 0 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell30 Sep 2025US 12,431,333 B2PDF Solutions, Inc.
- Charged particle source module29 Apr 2025US 12,288,663 B2ASML Netherlands B. V.
- Electron beam resist composition11 Feb 2025US RE50,296 E1The University of Manchester
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell25 Jun 2024US 12,020,897 B2PDF Solutions, Inc.
- Pattern formation method and template manufacturing method2 Jan 2024US 11,862,430 B2Kioxia Corporation
- Multibeam writing method and multibeam writing apparatus5 Mar 2026US 2026/0066222 A1NuFlare Technology, Inc.
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell8 Jan 2026US 2026/0011529 A1PDF Solutions, Inc.
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell12 Sep 2024US 2024/0304414 A1PDF Solutions, Inc.
- Electron beam writing apparatus and electron beam writing method14 Mar 2024US 2024/0087845 A1NuFlare Technology, Inc.
- Systems, devices, and methods for aligning a particle beam and performing a non-contact electrical measurement on a cell and/or non-contact electrical measurement cell vehicle using a registration cell7 Sep 2023US 2023/0282444 A1PDF Solutions, Inc.
Most cited
By later US patents
- Devices and methods for improved reflective electron beam lithography82US 8,722,286 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2014
- Device manufacture involving step-and-scan delineation79US 5,260,151 AAT&T Bell Laboratories · 1993
- Maskless photon-electron spot-grid array printer64US 6,841,787 B2APPLIED Materials.Inc. · 2005
- Ion and charged particle source for production of thin films62US 6,878,930 B12005
- Method for forming quantum dots59US 5,229,320 ASony Corporation · 1993