H01J 37/147
Arrangements for directing or deflecting the discharge along a desired path
Official title: Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10)
H01J37/147 (Arrangements for directing or deflecting the discharge along a desired path) appears on 1,418 US grants and 1,533 published applications in this corpus.
Search patents in H01J- Granted patents
- 1,418
- Published applications
- 1,533
- Assignees
- 335
- Inventors
- 2,371
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 6 | 0 |
| 1977 | 5 | 0 |
| 1978 | 9 | 0 |
| 1979 | 4 | 0 |
| 1980 | 2 | 0 |
| 1981 | 4 | 0 |
| 1982 | 5 | 0 |
| 1983 | 6 | 0 |
| 1984 | 5 | 0 |
| 1985 | 6 | 0 |
| 1986 | 6 | 0 |
| 1987 | 3 | 0 |
| 1988 | 5 | 0 |
| 1989 | 7 | 0 |
| 1990 | 12 | 0 |
| 1991 | 11 | 0 |
| 1992 | 5 | 0 |
| 1993 | 3 | 0 |
| 1994 | 7 | 0 |
| 1995 | 7 | 0 |
| 1996 | 7 | 0 |
| 1997 | 5 | 0 |
| 1998 | 9 | 0 |
| 1999 | 7 | 0 |
| 2000 | 8 | 0 |
| 2001 | 9 | 7 |
| 2002 | 11 | 14 |
| 2003 | 25 | 24 |
| 2004 | 28 | 29 |
| 2005 | 21 | 20 |
| 2006 | 25 | 33 |
| 2007 | 16 | 30 |
| 2008 | 31 | 45 |
| 2009 | 29 | 24 |
| 2010 | 32 | 35 |
| 2011 | 29 | 32 |
| 2012 | 24 | 31 |
| 2013 | 29 | 42 |
| 2014 | 37 | 37 |
| 2015 | 57 | 100 |
| 2016 | 64 | 68 |
| 2017 | 79 | 67 |
| 2018 | 61 | 80 |
| 2019 | 85 | 118 |
| 2020 | 111 | 110 |
| 2021 | 94 | 97 |
| 2022 | 81 | 93 |
| 2023 | 65 | 116 |
| 2024 | 69 | 104 |
| 2025 | 85 | 109 |
| 2026 | 67 | 68 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector6 Oct 2026US 12,755,923 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Aberration correction systems and charged particle microscope systems including the same6 Oct 2026US 12,755,924 B2FEI Company
- Method of characterizing a detection path of a charged particle beam and a charged particle mirror29 Sep 2026US 12,749,645 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- System and method for inspection by deflector control in a charged particle system22 Sep 2026US 12,744,178 B2ASML Netherlands B. V.
- Electron beam apparatus, inspection tool and inspection method22 Sep 2026US 12,744,181 B2ASML Netherlands B. V.
- System and Method for Extending Faraday Setup Cup Life Time by Scanning Ion Beam during Setup1 Oct 2026US 2026/0302125 A1APPLIED Materials.Inc.
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Certain improvements of multi-beam generating and multi-beam deflecting units24 Sep 2026US 2026/0290743 A1Carl Zeiss MultiSEM GmbH
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
- Method for finding optimal image contrast when using a laser phase plate17 Sep 2026US 2026/0279719 A1FEI Company
Most cited
By later US patents
- Charged particle beam irradiation apparatus139US 6,218,675 B1Hitachi, Ltd. · 2001
- System and method for magnetic scanning, accelerating, and implanting of an ion beam122US 5,483,077 ANissin Electric Co., Ltd. · 1996
- Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring121US 9,852,889 B1Lam Research Corporation · 2017
- Electromagnet and magnetic field generating apparatus109US 6,365,894 B2Hitachi, Ltd. · 2002
- Electromagnet and magnetic field generating apparatus108US 6,236,043 B1Hitachi, Ltd. · 2001