System and method for inspection by deflector control in a charged particle system
AssigneeASML Netherlands B.V.
InventorsDatong Zhang, Chih-hung Wang, Oliver Desmond Patterson, Xiaohu Tang
Life of this patent
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Abstract
Apparatuses, systems, and methods for providing beams for using deflector control to control charging on a sample surface of charged particle beam systems. In some embodiments, a controller including circuitry configured to scan a plurality of nodes of the sample to charge the plurality of nodes; adjust a scan rate of a beam such that a quantity of charge deposited on each node of the plurality of nodes varies with respect to at least one other node; generate a plurality of images; and compare the plurality of images to enable detection of a defect associated with any of the plurality of nodes of the sample.
Claims20
A system for inspecting a sample, the system comprising:
- a controller including circuitry configured to cause the system to perform:
- scanning a plurality of nodes of the sample to charge the plurality of nodes;
- adjusting a scan rate of a charged particle beam such that a quantity of charge deposited on each node of the plurality of nodes varies with respect to at least one other node;
- generating a plurality of images;
- and
- comparing the plurality of images to enable detection of a defect associated with any of the plurality of nodes of the sample.
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computing device to cause the computing device to perform a method for inspection of a sample, the method comprising:
- scanning a plurality of nodes of the sample to charge the plurality of nodes;
- adjusting a scan rate of a charged particle beam such that a quantity of charge deposited on each node of the plurality of nodes varies with respect to at least one other node;
- generating a plurality of images;
- and comparing the plurality of images to enable detection of a defect associated with any of the plurality of nodes of the sample.
Dependencies are inferred from the claim text.