H01J 37/1472
Deflecting along given lines
Official title: {Deflecting along given lines}
H01J37/1472 (Deflecting along given lines) appears on 746 US grants and 812 published applications in this corpus.
Search patents in H01J- Granted patents
- 746
- Published applications
- 812
- Assignees
- 210
- Inventors
- 1,376
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 1 | 0 |
| 1978 | 4 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 1 | 0 |
| 1982 | 4 | 0 |
| 1983 | 5 | 0 |
| 1984 | 3 | 0 |
| 1985 | 3 | 0 |
| 1986 | 6 | 0 |
| 1987 | 1 | 0 |
| 1988 | 2 | 0 |
| 1989 | 4 | 0 |
| 1990 | 5 | 0 |
| 1991 | 7 | 0 |
| 1992 | 5 | 0 |
| 1993 | 1 | 0 |
| 1994 | 7 | 0 |
| 1995 | 6 | 0 |
| 1996 | 4 | 0 |
| 1997 | 3 | 0 |
| 1998 | 3 | 0 |
| 1999 | 4 | 0 |
| 2000 | 4 | 0 |
| 2001 | 5 | 4 |
| 2002 | 5 | 7 |
| 2003 | 13 | 10 |
| 2004 | 12 | 12 |
| 2005 | 8 | 12 |
| 2006 | 10 | 16 |
| 2007 | 7 | 14 |
| 2008 | 18 | 28 |
| 2009 | 15 | 9 |
| 2010 | 18 | 15 |
| 2011 | 15 | 15 |
| 2012 | 10 | 10 |
| 2013 | 11 | 16 |
| 2014 | 15 | 11 |
| 2015 | 24 | 46 |
| 2016 | 26 | 40 |
| 2017 | 38 | 32 |
| 2018 | 32 | 33 |
| 2019 | 44 | 60 |
| 2020 | 52 | 57 |
| 2021 | 48 | 60 |
| 2022 | 49 | 62 |
| 2023 | 40 | 73 |
| 2024 | 39 | 63 |
| 2025 | 58 | 66 |
| 2026 | 47 | 41 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Aberration correction systems and charged particle microscope systems including the same6 Oct 2026US 12,755,924 B2FEI Company
- Method of characterizing a detection path of a charged particle beam and a charged particle mirror29 Sep 2026US 12,749,645 B2ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- System and method for inspection by deflector control in a charged particle system22 Sep 2026US 12,744,178 B2ASML Netherlands B. V.
- Electron beam apparatus, inspection tool and inspection method22 Sep 2026US 12,744,181 B2ASML Netherlands B. V.
- Charged particle beam device and specimen observation method15 Sep 2026US 12,738,442 B2Hitachi High-Tech Corporation
- System and Method for Extending Faraday Setup Cup Life Time by Scanning Ion Beam during Setup1 Oct 2026US 2026/0302125 A1APPLIED Materials.Inc.
- Method and apparatus for continuous chained energy ion implantation1 Oct 2026US 2026/0302126 A1Axcelis Technologies, Inc.
- Certain improvements of multi-beam generating and multi-beam deflecting units24 Sep 2026US 2026/0290743 A1Carl Zeiss MultiSEM GmbH
- Blended energy implant17 Sep 2026US 2026/0279718 A1Axcelis Technologies, Inc.
- Method for finding optimal image contrast when using a laser phase plate17 Sep 2026US 2026/0279719 A1FEI Company
Most cited
By later US patents
- System and method for magnetic scanning, accelerating, and implanting of an ion beam122US 5,483,077 ANissin Electric Co., Ltd. · 1996
- Electromagnet and magnetic field generating apparatus109US 6,365,894 B2Hitachi, Ltd. · 2002
- Electromagnet and magnetic field generating apparatus108US 6,236,043 B1Hitachi, Ltd. · 2001
- System and method for producing oscillating magnetic fields in working gaps useful for irradiating a surface with atomic and molecular ions89US 5,311,028 ANissin Electric Co., Ltd. · 1994
- Magnetic deflection system for ion beam implanters61US 5,393,984 ANissin Electric Co., Ltd. · 1995