System and Method for Extending Faraday Setup Cup Life Time by Scanning Ion Beam during Setup

An ion implantation system, comprising:

• an ion source from which a ribbon ion beam is extracted;
• a mass resolving device having a mass resolving aperture;
• a dithering magnet, located downstream from the mass resolving device, which scans the ribbon ion beam in a width direction to create a dithered ion beam;
• a workpiece holder;
• a retractable current sensor, disposed between the dithering magnet and the workpiece holder, having a retracted position, used during normal operation and an inserted position, wherein the retractable current sensor is in a path of the ribbon ion beam and which is used during a configuration and calibration procedure;
• and
• a controller, wherein the controller creates relative movement between the ribbon ion beam and the retractable current sensor during the configuration and calibration procedure, measures a current detected by the retractable current sensor and uses the measured current to adjust one or more components in the ion implantation system to create a ribbon ion beam having a desired beam current.

An ion implantation system, comprising:

• an ion source from which an ion beam is extracted;
• a scanning component which scans the ion beam in a scan direction;
• a workpiece holder that moves in a second direction perpendicular to the scan direction;
• a retractable current sensor, disposed between the scanning component and the workpiece holder, having a retracted position, used during normal operation and an inserted position, wherein the retractable current sensor is in a path of the ion beam and which is used during a configuration and calibration procedure;
• and
• a controller, wherein the controller creates relative movement between the ion beam and the retractable current sensor during the configuration and calibration procedure, measures a current detected by the retractable current sensor and adjusts at least one parameter of the ion implantation system based on the current detected.