Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsPavel Adamec, Robert Zimmermann
Life of this patent
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Abstract
A deflector for a charged particle beam apparatus is described. The deflector has an axis and is configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector including a plurality of flat coils including two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.
Claims18
A deflector for a charged particle beam apparatus, the deflector having an axis and being configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector comprising:
- a plurality of flat coils comprising two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector, wherein the two pairs of flat coils are arranged on opposite sides about a central axis of the two pairs of flat coils, wherein the flat coils of the two pairs of flat coils are arranged asymmetrically with respect to the central axis, and wherein, in an image plane perpendicular to the axis, the flat coils are arranged in a point-asymmetric manner with respect to the point of intersection of the image plane and the axis.
A deflecting system for a charged particle beam apparatus, the deflecting system configured for deflecting a charged particle beam of the charged particle beam apparatus relative to an optical axis, the deflecting system comprising a plurality of deflectors, each deflector of the plurality of deflectors having an axis and being configured to deflect the charged particle beam in a direction perpendicular to the axis, each deflector comprising:
- a plurality of flat coils comprising two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector;
- wherein the two pairs of flat coils of at least one deflector of the plurality of deflectors are arranged on opposite sides about a central axis of the two pairs of flat coils, wherein the flat coils of the two pairs of flat coils of the at least one deflector are arranged asymmetrically with respect to the central axis, and wherein, in an image plane perpendicular to the axis, the flat coils are arranged in a point-asymmetric manner with respect to the point of intersection of the image plane and the axis.
A charged particle beam apparatus comprising a deflecting system configured for deflecting a charged particle beam of the charged particle beam apparatus relative to an optical axis, the deflecting system comprising a plurality of deflectors for the charged particle beam apparatus, each deflector of the plurality of deflectors having an axis and being configured to deflect the charged particle beam in a direction perpendicular to the axis, each deflector comprising:
- a plurality of flat coils comprising two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector;
- wherein the two pairs of flat coils of at least one deflector of the plurality of deflectors are arranged on opposite sides about a central axis of the two pairs of flat coils, wherein the flat coils of the two pairs of flat coils of the at least one deflector are arranged asymmetrically with respect to the central axis, and wherein, in an image plane perpendicular to the axis, the flat coils are arranged in a point-asymmetric manner with respect to the point of intersection of the image plane and the axis.
A method of fabricating a deflector for a charged particle beam apparatus, comprising:
- arranging four flat coils as two pairs of flat coils of the deflector around an axis of the deflector, wherein the two pairs of flat coils are arranged on opposite sides about the axis, wherein arranging the four flat coils comprises arranging the four flat coils asymmetrically about the axis, and wherein arranging the four flat coils comprises arranging the four flat coils such that, in an image plane perpendicular to the axis, the four flat coils are arranged in a point-asymmetric manner with respect to the point of intersection of the image plane and the axis.
Dependencies are inferred from the claim text.